目的 对比TiN/TiCN/Al2O3/TiN和TiN/TiCN/Al2O3/TiCNO两种多层涂层的组织性能。方法 采用化学气相沉积（CVD）技术在硬质合金基体上沉积TiN/TiCN/Al2O3/TiN和TiN/TiCN/Al2O3/TiCNO两种多层涂层。通过X射线衍射仪（XRD）和扫描电子显微镜（SEM）分析涂层的物相和组织形貌，采用纳米力学测试系统测试涂层顶层的硬度和弹性模量，利用显微维氏硬度计和划痕仪分别测量涂层的显微硬度和结合强度，利用往复式多功能摩擦磨损试验机研究涂层的摩擦磨损性能。结果 顶层TiN晶粒为柱状晶，顶层TiCNO晶粒呈细针状。与顶层TiN相比，顶层TiCNO硬度更大，抗塑性变形能力更强。与以TiN为顶层的多层涂层相比，以TiCNO为顶层的多层涂层表面粗糙度、摩擦系数较大，结合强度较低。当磨损只发生在顶层时，耐磨性取决于顶层涂层的性能，TiN/TiCN/Al2O3/TiN的磨损体积和磨损率为TiN/TiCN/Al2O3/TiCNO的1.2倍。当磨损进行到顶层与Al2O3层界面时，结合强度对耐磨性也有重要影响，TiN/TiCN/Al2O3/TiN的磨损体积和磨损率是TiN/TiCN/Al2O3/TiCNO的82%。结论 与TiN/TiCN/Al2O3/TiN相比，TiN/TiCN/Al2O3/TiCNO的顶层TiCNO硬度较大，抗塑性变形能力强，其顶层耐磨性较好。改善TiN/TiCN/Al2O3/TiCNO多层涂层表面粗糙度和结合强度将进一步提高该涂层的摩擦磨损性能。

The work aims to compare the microstructure and properties of TiN/TiCN/Al2O3/TiN and TiN/TiCN/Al2O3/ TiCNO multilayer coatings. The two kinds of multilayer coatings were deposited on cemented carbides by chemical vapor deposition. The microstructure of coatings was characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The nano-hardness and elasticity modulus of top-layer were measured by nano-mechanical testing system. The micro-hardness and adhesion strength coatings were tested by micro-hardness tester and scratch tester, respectively. The friction and wear properties of coatings were investigated by reciprocating tribometer. The grains of TiN and TiCNO top-layer displayed columnar and needle-like morphology, respectively. Compared with TiN top-layer, TiCNO top-layer had higher hardness and resistance to plastic deformation. However, the surface roughness and friction coefficient of the multilayer coating with TiCNO top-layer were higher, and its adhesion strength was lower than the multilayer coating with TiN top-layer. When the wear took place in the top-layer, the wear resistance of multilayer coating was determined by the performance of top-layer. The wear volume and wear rate of TiN/TiCN/Al2O3/TiN coating were 1.2 times of TiN/TiCN/Al2O3/TiCNO coating. When the wear occurred at the interface between top-layer and Al2O3 layer, the wear resistance was also affected by the adhesion strength. The wear volume and wear rate of TiN/TiCN/Al2O3/TiN coating were 82% of those of TiN/TiCN/Al2O3/TiCNO coating. Compared with TiN/TiCN/Al2O3/TiN coating, TiCNO top-layer of TiN/TiCN/Al2O3/TiCNO coating has higher nano-hardness, stronger resistance to plastic deformation and better wear resistance. The friction and wear properties of TiN/TiCN/Al2O3/TiCNO coating are expected to be enhanced by improving the surface roughness and adhesion strength.