目的 在锆合金基底上沉积FeCrAlY薄膜，研究其高温水蒸气环境中的抗腐蚀性能。方法 采用磁控溅射的方法在锆合金基底与玻璃基底上沉积FeCrAlY薄膜。使用XRD、SEM对沉积的FeCrAlY薄膜进行结构、形貌表征，使用XPS对FeCrAlY薄膜高温水蒸气腐蚀前后的元素价态变化进行表征和分析。结果 在900 ℃高温水蒸气环境中测试了锆合金与锆合金沉积FeCrAlY薄膜的腐蚀性能。发现与锆合金相比，锆合金沉积FeCrAlY薄膜的样品表现出了良好的抗腐蚀性能，氧化增重少于锆合金样品的30%。结论 磁控溅射法制备的FeCrAlY薄膜在高温水蒸气环境下对锆合金基底起到了很好的保护作用。高温水蒸气腐蚀过程中，由于第三元素效应的发生，即FeCrAlY薄膜中的铬元素促使铝元素析出到FeCrAlY薄膜表面，在高温水蒸气环境下氧化生成氧化铝钝化膜，氧化铝钝化膜起到了阻挡层的作用，减缓了腐蚀的进行。

The work aims to deposit FeCrAlY thin film on Zr alloy substrate and use it as a protection layer to alleviate the corrosion under high-temperature water vapor environment. The FeCrAlY thin film was deposited on Zr and glass substrate via magnetron sputtering method. The XRD and SEM were used to characterize the structure and morphology of FeCrAlY thin film. The XPS was employed to investigate the valence states change before and after corrosion under high-temperature water vapor environment. The corrosion property of Zr and FeCrAlY thin film coated on Zr was tested under high-temperature water vapor environment of 900 ℃. The results showed that FeCrAlY thin film coated on Zr displayed better anticorrosion property compared to Zr. The weight gain of FeCrAlY thin film coated on Zr was nearly 30% less than that of Zr. The FeCrAlY thin film deposited on Zr via magnetron sputtering method plays the role of protection layer under high-temperature water vapor environment. During the process of corrosion, Al2O3 passivation layer separates out with help of Cr because of “third element effect”. The separated Al2O3 layer plays as protection layer and inhibits corrosion.