目的 使Co-TiO2纳米颗粒复合薄膜同时具备高的磁化强度及电阻率，从而实现更好的高频软磁特性。方法 通过磁控共溅射的方法，在不同金属靶功率下制备了Co-TiO2纳米颗粒复合薄膜，并探究金属含量对薄膜的微观结构、表面形貌、电学和静态磁学性能的影响。结果 薄膜中的金属颗粒被非晶态的TiO2分散。金属含量的增加可以显著提高纳米颗粒薄膜中金属颗粒的结晶性，降低薄膜电阻率，并且通过改变金属含量，可使薄膜逐渐从超顺磁态向铁磁态转变，达到精确调控纳米颗粒复合薄膜的磁学和电学性能的目的。结论 在金属含量达到54%时，实现了高电阻率和高饱和磁化强度共存，有望得到具有高频软磁特性的纳米颗粒复合薄膜。

The Co-Tio2 nanoparticle composite film has high magnetic strength and resistivity at the same time, so as to achieve better high-frequency soft magnetic properties. Co-TiO2 nanoparticle composite films were prepared by magnetron co-sputtering under different metal target power parameters, and effects of metal content on the microstructure, surface morphology and electrical and static magnetic properties of the films were systematically investigated. Metal particles in the film were found to be dispersed by amorphous TiO2. The increase of metal content could significantly improve the crystallinity of metal particles in nanoparticle films, reduce the resistivity of films, and gradually transform the film from superparamagnetic state to ferromagnetic state by changing the metal content, thus realizing the accurate regulation of the magnetic and electrical properties of nanoparticle composite films. When the metal content reaches 54%, the high resistivity and high saturation magnetization can coexist, which is expected to obtain the nanoparticle composite films with high frequency soft magnetic characteristics.