目的 将HiPIMS电源应用于PECVD技术，在304不锈钢管内壁沉积DLC涂层，以提高其机械、耐蚀及摩擦学性能。方法 将HiPIMS电源应用于PECVD技术，并利用空心阴极放电效应在管道内产生高密度等离子体，沉积DLC涂层。通过拉曼光谱、扫描电子显微镜和EDS对DLC涂层的结构和成分进行表征，并通过纳米压痕测试、划痕试验、静态极化曲线和摩擦磨损试验，分别评价304不锈钢管基底和DLC涂层的硬度、膜基结合力、耐腐蚀性能、摩擦学性能和耐磨性。结果 HiPIMS电源应用于PECVD技术可在304不锈钢管内壁沉积DLC涂层。DLC涂层的厚度可达5.60~10.26 μm，硬度可达10~15 GPa，与304管内壁的结合力（Lc2）均大于7 N。DLC涂层的腐蚀电流密度较304不锈钢管基底降低了一个数量级，腐蚀电位也发生了正移。DLC涂层具有良好的润滑效果，摩擦系数低至0.06~0.18，磨损率低至2.5×10-7~8.1× 10-7 mm3/(N?m)，远低于304不锈钢管基底的磨损率（80×10-7 mm3/(N?m)）。结论 将HiPIMS电源应用于PECVD技术在304不锈钢内壁沉积的DLC涂层具有较高的硬度，与304不锈钢管内壁具有较高的结合力，同时具有优异的耐腐蚀性能和耐磨性以及良好的润滑作用。HiPIMS电源应用于PECVD技术有望应用更长管道内壁DLC涂层的制备。

The work aims to deposit DLC coatings on inner wall of 304SS tube by PECVD technology with HiPIMS power supply, so as to improve the mechanical properties and corrosion and wear resistance of the tube. HiPIMS power supply was applied to PECVD technology to generate high density plasma deposited DLC coatings inside 304SS tube by hollow cathode effect. The Raman spectra, SEM and EDS were used to characterize the structure and composition of DLC coatings. The hardness, adhesion force, corrosion resistance, tribology and wear resistance of DLC coatings were assessed by nano-indentation test, scratch test, potentiodynamic polarization test and friction and wear test, respectively. By applying HiPIMS power supply in PECVD technology, DLC coatings could be deposited on inner wall of 304SS tube. The thickness of DLC coatings increased from 5.60 μm to 10.26 μm, the hardness could reach 10~15 GPa, and the adhesion force (Lc2) between DLC coatings and inner wall of 304SS tube was more than 7 N. Furthermore, the corrosion current density of DLC coatings was smaller than that on bottom of bare 304SS tube about one order of magnitude and the corrosion potential shifted positively. DLC coatings had good lubrication effects with friction coefficients of (0.06~0.18) and wear rates of 2.5×10-7~8.1×10-7 mm3/(N?m) which were lower than the wear rate of bare 304SS tube (80×10-7 mm3/(N?m)). DLC coatings with higher hardness can be successfully deposited on the inner wall of 304SS tube by PECVD technology with HiPIMS power supply and the as-coated DLC coatings possess higher adhesion force with inner wall of 304SS tube and excellent corrosion and wear resistance as well as good lubrication. In addition, PECVD technology with HiPIMS power supply is expected to be used for the deposition of DLC coatings on the inner wall of longer pipe.