摘要
目的 在钛微弧氧化(MAO)膜层表面沉积类金刚石碳(DLC)薄膜,探索DLC薄膜沉积对不同表面形貌微弧氧化膜层摩擦学性能的影响。方法 在铝酸盐电解液体系中,通过改变微弧氧化时间(10、60 min)制备表面粗糙度与平均孔径不同的两种微弧氧化膜层MAO_10和MAO_60,而后利用磁控溅射技术在其表面沉积DLC薄膜,获得MAO/DLC复合膜层。通过白光共聚焦显微镜、CSM球盘式摩擦磨损试验机、Mahr轮廓仪和扫描电子显微镜等实验设备,对膜层的表面粗糙度、微孔尺寸、摩擦系数、磨损率和磨痕形貌等进行观察和分析。结果 微弧氧化时间增加导致MAO膜层的表面粗糙度增大,表面微孔数目下降但平均孔径增大。DLC沉积可以在MAO_10膜层表面形成较好的DLC覆盖层,但在粗糙度较高和孔径较大的MAO_60膜层表面呈现出明显的不连续分布。MAO/DLC复合膜层的粗糙度和平均孔径明显低于MAO膜层。摩擦学性能测试表明,MAO_10/DLC复合膜层的摩擦系数和磨损率相比于MAO_10膜层均明显下降,MAO_10膜层和MAO_10/DLC复合膜层的稳定摩擦系数分别为0.85和0.24,磨损率分别为12.76×10-6 mm3/(N?m)和3.71×10-6 mm3/(N?m);MAO_60/DLC复合膜层的摩擦系数和磨损率则与MAO_60膜层比较接近,MAO_60膜层和MAO_60/DLC复合膜层的稳定摩擦系数分别为0.77和0.67,磨损率分别为68.02×10-6 mm3/(N?m)和61.81×10-6 mm3/(N?m)。结论 在表面较平整且平均孔径较小的钛微弧氧化膜层表面沉积DLC薄膜时,所得MAO/DLC复合膜层在摩擦过程中可以形成较为连续的润滑层,其摩擦学性能良好。相反,在表面粗糙和平均孔径较大的钛微弧氧化膜层表面沉积DLC薄膜时,所得MAO/DLC复合膜层在摩擦过程中难以形成连续的润滑层,其摩擦学性能较差。
Abstract
The work aims to deposit diamond-like carbon (DLC) film on the surface of micro-arc oxidation films on titanium and explore the influence of DLC film deposition on the tribological property of micro-arc oxidation (MAO) films with different surface morphologies. Two kinds of MAO films (MAO_10 and MAO_60) with different surface roughness and micro-pore sizes were fabricated in the aluminate electrolytes with the MAO time of 10 min and 60 min, respectively. Then, a DLC film was deposited on the surface of the MAO film by magnetron sputtering to obtain MAO/DLC composite films. The surface roughness, micro-pore size, friction coefficient, wear rate and wear scar morphology of the MAO and MAO/DLC films were observed and studied by confocal microscope, CSM friction tester, Mahr surface profiler and scanning electron microscopy (SEM). The increasing MAO time increased surface roughness and average micro-pore size, but decreased micro-pore number of MAO films. After the DLC deposition, a relatively good DLC top layer was formed on the surface of MAO_10 film. However, the DLC top layer on the MAO_60 film exhibited a discontinuous distribution due to the high surface roughness and large micro-pore size of MAO_60 film. The surface roughness and average micro-pore size of MAO/DLC composite films were lower than that of MAO films. The tribological test results showed that the friction coefficient and wear rate of MAO_10/DLC composite film were significantly lower than that of MAO_10 film. The stable friction coefficient of MAO_10 film and MAO_10/DLC composite film was 0.85 and 0.24, and the wear rate was 12.76×10-6 mm3/(N?m) and 3.71×10-6 mm3/(N?m), respectively. In contrast, the stable friction coefficient and average wear rate of MAO_60/DLC composite film were near to that of MAO_60 film. The stable friction coefficient of MAO_60 film and MAO_60/DLC composite film was 0.77 and 0.67, and the wear rate was 68.02×10-6 mm3/(N?m) and 61.81×10-6 mm3/(N?m), respectively. When the DLC film is deposited on the MAO film with relatively smooth surface and small micro-pore size, the fabricated MAO/DLC composite film has good tribological property due to the formation of a continuous lubricating layer. In contrast, when the DLC film is deposited on the MAO film with rough surface and large micro-pore size, the continuous lubricating layer is difficult to form, thus leading to a relatively poor tribological property.
关键词
TA2;微弧氧化;DLC;摩擦系数;磨损率
Key words
TA2; micro-arc oxidation; DLC; friction coefficient; wear rate
李云玉, 任西鹏, 陈兆祥, 李浩, 任丽梅.
DLC薄膜沉积对不同表面形貌的钛微弧氧化膜层摩擦学性能的影响[J]. 表面技术. 2019, 48(7): 112-121
LI Yun-yu, REN Xi-peng, CHEN Zhao-xiang, LI Hao, REN Li-mei.
Influence of DLC Film Deposition on the Tribological Property of Micro-arc Oxidation Films with Different Surface Morphologies on Titanium[J]. Surface Technology. 2019, 48(7): 112-121
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基金
河北省引进留学人员资助项目(CL201726);河北省自然科学基金项目(E2016203270);河北省高等学校科学技术研究项目(QN2019013);燕山大学基础研究专项(020000904);燕山大学博士基金项目(B943)