针对超声振动复合加工方法种类繁多且表面微结构指征复杂等问题，阐述了表面微结构的内容和研究现状，论述了国内外超声切削、磨削、表面强化等方法的加工原理及超声振动加工表面微结构特性的试验研究方法，归纳了超声振动条件下表面粗糙度、表面微观形貌的建模方法及其特点，讨论了实验回归建模、数值解析建模和神经网络建模的研究进展，并预测了国内外超声振动表面加工的新技术领域和发展方向，对改善高性能难加工材料的表面微结构特性具有重要意义。

The introduction of ultrasonic vibration into typical material processing can solve the problem that traditional processing is difficult to overcome. In view of the variety of ultrasonic vibration machining methods and the complexity of surface micro-structures, the main contents and research status of surface micro-structures have been described. The machining principle of ultrasonic cutting, ultrasonic grinding and ultrasonic surface strengthening and the experimental research methods of surface micro-structure characteristics in ultrasonic machining have been discussed. The modeling methods and characteristics of surface roughness and surface micro-topography under ultrasonic vibration are summarized. The research progress of experimental modeling, numerical analysis modeling and neural network modeling have been expounded. Finally, the new technology fields and development tendency of ultrasonic vibration surface processing technology at domestic and foreign are predicted, which is of great significance to improve the surface micro-structure characteristics of high-performance and difficult-to-machine materials.