目的 采用阴极电弧镀叠加磁控溅射的复合PVD涂层技术，实现梯度成分结构TiAlSiYN多元涂层的制备。方法 在涂层沉积过程中，通过切换不同成分的电弧靶，获得成分梯度变化的TiAlSiYN涂层。利用扫描电子显微镜及其附带能谱仪、X射线衍射仪分析涂层氧化前后的截面组织形貌、成分和物相结构。结果 在阴极电弧沉积过程中，通过磁控溅射方式植入微量Y元素会干扰涂层的生长，降低涂层的生长速率。Y元素在涂层中具有细化柱状组织的作用，并使涂层的开始氧化温度和氧化速率降低。相比于均一成分结构的TiAlSiN涂层，均一成分结构的TiAlSiYN涂层在800 ℃时表层未发生氧化。在900 ℃保温1 h后，TiAlSiYN涂层的高氧含量氮氧化物层厚度小于TiAlSiN涂层。梯度成分结构使TiAlSiYN涂层的抗氧化性能明显降低，在900 ℃保温1 h后，梯度成分结构的TiAlSiYN涂层组织完全被氧化，氧化组织以金红石结构的TiO2为主，还有少量锐钛矿结构的TiO2、SiO2和Al2O3。结论 微量稀土Y元素具有改善涂层抗氧化性的作用，而梯度成分结构不利于涂层的抗氧化性。

The work aims to deposit the TiAlSiYN multi-component coatings with gradient composition structure by com-posite PVD coating technique combining cathodic arc plating and magnetron sputtering. In the deposition process, the TiAlSiYN coating with changing gradient compositional structure was obtained by switching the arc targets. Scanning electron microscopy and its accompanying spectrometer and X-ray diffractometer were used to analyze the cross-sectional microstructure, composition and phase structure of the coating before and after oxidation. The implantation of trace amounts of yttrium by magnetron sputtering in the process of cathodic arc deposition interfered with the growth of the coating and reduced the growth rate of the coating. Y element had the function of refining the columnar structure in the coating, and lowering the initial oxidation temperature and oxidation rate of the coating. Compared with the TiAlSiN coating with homogeneous composition, the surface of the TiAlSiYN coating with homogeneous composition was not oxidized at 800 ℃. The thickness of the high-oxygen oxynitride layer was less than that of the TiAlSiN coating after being kept at 900 ℃ for 1 h. The graded-composition structure significantly reduced the oxidation resistance of the TiAlSiYN coating. After being kept at 900 ℃ for 1 h, the TiAlSiYN coatings with graded-composition structure were completely oxidized. The oxidized structure mainly included rutile-TiO2, and a small amount of anatase-TiO2, SiO2 and Al2O3. Therefore, the rare earth element Y has an effect of improving the oxidation resistance of the coating while the gradient composition structure is detrimental to the oxidation resistance of the coating.