目的 研究LiFePO4/C多层膜在不同的调制周期下的电化学性能。方法 采用多靶磁控溅射方法，在304不锈钢基底上，先沉积10 nm Ti薄膜作为阻挡层，然后交替沉积LiFePO4薄膜和C薄膜，制备三组不同调制周期的[LiFePO4/C]n多层膜。通过扫描电子显微镜（SEM）及其附带的EDS能谱仪对退火前和经500 ℃退火2 h后的不同调制周期[LiFePO4/C]n多层膜的截面形貌、成分进行表征，利用X射线衍射仪（XRD）对退火前和经500 ℃退火2 h后的LiFePO4薄膜及不同调制周期[LiFePO4/C]n多层膜的结构进行表征，利用激光显微拉曼光谱仪（Raman）分析经500 ℃退火2 h后不同调制周期[LiFePO4/C]n多层膜中的C结构，利用循环伏安和恒流充放电法对LiFePO4薄膜和不同调制周期[LiFePO4/C]n多层膜的电化学性能进行测试。结果 调制周期为7.5次的[LiFePO4 (160 nm)/C(16 nm)]7.5多层膜中的碳石墨化程度高于调制周期为15次的[LiFePO4 (80 nm)/C(8 nm)]15和调制周期为5次的[LiFePO4 (240 nm)/C(24 nm)]5多层膜，且具有更好的充放电容量和倍率性能。在0.1 C放电倍率下，[LiFePO4 (160 nm)/C(16 nm)]7.5多层膜的放电容量为151 mAh/g，在5 C高放电倍率下的放电容量为30 mAh/g。结论 适当的调制周期下，LiFePO4/C多层膜具有良好的电化学性能。

The work aims to study the electrochemical properties of LiFePO4/C multilayer films in different modulation pe-riods. 10 nm Ti film was deposited on 304 stainless steel as the barrier layer by multi-target magnetron sputtering and then the LiFePO4/C films were deposited alternately to prepare three [LiFePO4/C]n multilayer films with different modulation periods. The cross-sectional morphology and composition of [LiFePO4/C]n multilayer films with different modulation periods before and after annealing at 500 ℃ for 2 h were characterized by SEM and EDS. The structure of LiFePO4 film and [LiFePO4/C]n multilayer films with different modulation periods before and after annealing at 500 ℃ for 2 h was characterized by XRD. The C structure of [LiFePO4/C]n multilayer films with different modulation periods after annealing at 500 ℃ for 2 h was characterized by Raman. The electrochemical property of LiFePO4 film and [LiFePO4/C]n multilayer films with different modulation periods was evaluated by cyclic voltammetry and galvanostatic charge-discharge tests. The degree of graphitization in [LiFePO4 (160 nm)/C(16 nm)]7.5 (the modulation cycle of 7.5 times) multilayer was higher than that in [LiFePO4 (80 nm)/C(8 nm)]15 (the modulation cycle of 15 times) and [LiFePO4 (240 nm)/C(24 nm)]5 (the modulation cycle of 5 times) multilayers. The [LiFePO4 (160 nm)/C(16 nm)]7.5 multilayer had better charge-discharge capacity and rate performance than the [LiFePO4 (80 nm)/C(8 nm)]15 and [LiFePO4 (240 nm)/ C(24 nm)]5 multilayers. The specific capacity of [LiFePO4 (160 nm)/C(16 nm)]7.5 was 151 mAh/g at 0.1 C, and the specific capacity was 30 mAh/g at 5 C. LiFePO4/C multilayer has good electrochemical properties under the appropriate modulation period.