目的 通过优化制备碳化硅纳米纤维的工艺及激光工艺参数，获得一种制备碳化硅纳米纤维的新方法。方法 利用500 W振镜式光纤激光器，在氩气的保护下，以一定的激光工艺参数辐照预置在镍基板上的纳米碳化硅颗粒，采用扫描电镜（SEM）、能谱仪（EDS）、X射线衍射仪（XRD）和透射电镜（TEM）分别对所得产物的形貌、元素组成、物相以及微观结构进行分析。结果 激光工艺参数对所得产物的形貌以及结构有一定的影响，当激光能量密度在7.71~8.75 kJ/cm2之间时，制备出的碳化硅纳米纤维由多晶和非晶结构组成，其直径范围在5~10 nm之间；当激光能量密度为7.92~8.33 kJ/cm2时，样品中除SiC外，还有少量的C元素。结论 激光辐照Ni基板上的碳化硅纳米颗粒，在优化的激光工艺参数下，可以制备出形貌良好的纳米纤维，为制备纳米材料提供了一种新途径。

The work aims to obtain a new method to prepare silicon carbide nano-fibers by optimizing the process and laser processing parameters. The nano-silicon carbide particles prepositioned on the Ni substrate was irradiated by the 500 W galva-nometer-type fiber laserunder the protection of argon. The surface morphology, elemental composition, phases and microstructure of obtained products were analyzed by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), X-ray diffractometry (XRD) and transmission electron microscopy (TEM), respectively. The laser processing parameters had certain effects on morphology and structure of obtained products. When the laser energy density was between 7.71 kJ/cm2 and 8.75 kJ/cm2, the prepared silicon carbide nano-fibers consisted of polycrystalline and amorphous structures and the diameter ranged from 5 nm to 10 nm. When the energy density of laser was 7.92 kJ/cm2 to 8.33 kJ/cm2, a small amount of C element was present in the sample in addition to SiC. Therefore, silicon carbide nano-fibers with good morphology can be obtained by the silicon carbide particles irradiatedon the Ni substrateat certain laser processing parameters, thus providing a new method for prepared silicon carbide nano-fibers.