目的 开发钼基体表面制备MoSi2高温抗氧化涂层的新工艺。方法 创造性地采用料浆包渗法在钼基体表面制备MoSi2高温抗氧化涂层，使用X射线衍射仪（XRD）结合能谱仪（EDS）分析并确定涂层的主体层和过渡层物相。通过扫描电子显微镜（SEM）观察涂层表面及断面的微观组织形貌，探讨硅化物形成机理并建立料浆包渗过程模型。探究料浆涂覆厚度、NaF活化剂含量、热处理温度、热处理时间等工艺参数对涂层厚度的影响。结果 采用料浆包渗法在钼基体表面制备出了双层硅化物涂层，外层为多边棱柱状MoSi2，内层为均匀致密的玻璃状Mo5Si3。料浆涂覆厚度较薄时，涂层内层（Mo5Si3）加厚，而外层（MoSi2）变薄。活化剂NaF质量分数在0~20%内与涂层厚度呈正相关性，质量分数达到20%后，涂层厚度基本不变。热处理温度在活化剂NaF和渗剂Si粉相变转化点附近，对涂层生成起较大作用。热处理时间越长，涂层总厚度越大，但涂层生成速率与热处理时间呈倒抛物线关系。结论 采用料浆包渗法，能在较低热处理温度下（800~1400 ℃）及较短的热处理时间内（1~7 h）在钼基体表面成功制备出致密的MoSi2高温抗氧化涂层，提高热处理温度和增加时间能够增加涂层厚度。

The work aims to develop a novel process for preparing MoSi2 high temperature oxidation resistant coating on the surface of molybdenum substrate. The MoSi2 coating was synthesized on the surface of molybdenum substrate subtly by slurry infiltration method. The phases of the coating, including the main layer and transition layer, were analyzed and determined by X-ray diffraction (XRD) and energy dispersive spectrometer (EDS). The morphology of microstructure on surface and cross-section of the coating was observed by scanning electron microscopy (SEM). Model of slurry infiltration process was established to illustrate the formation mechanism of the silicide. The effects of process parameters, such as slurry coating thickness, activator (NaF) content, temperature and duration of heat treatment, on the thickness of silicide coating were investigated in detail. Bilayer silicide coating was prepared on the surface of the molybdenum substrate by slurry infiltration technology. The outer layer was a polygonal prismatic MoSi2, while the inner layer was a uniform and dense glassy Mo5Si3. Thinner slurry led to thicker inner layer (Mo5Si3) and thinner outer layer (MoSi2). The coating thickness was linearly correlated with the content of activator (NaF, 0~20wt%), and it was almost constant when the content of NaF was above 20wt%. The coating formation was effected significantly when the heat treatment temperature was around the phase transformation point of activator NaF and infiltration agent Si. The total thickness of the coating grew with longer heat treatment duration, but the coating formation rate had an inverted parabolic relationship with extended duration. The dense MoSi2 oxidation resistant coating can be synthesized on the surface of molybdenum by slurry infiltration technology at a relatively low heat treatment temperature (800~1400 ℃) in a relatively short heat treatment time (1~7 h). The total thickness of the coating can be increased by increasing heat treatment temperature and extending the heating duration.