目的 探究超声磁粒复合研磨与超声振动复合抛光两个试验阶段对石英玻璃管内表面加工的可能性，寻求最优的工艺参数组合。方法 在石英玻璃管内添加柱形径向充磁辅助磁极，并添加超声振动，组成复合光整装置。在辅助磁极表面包裹一层研磨粒子，构成超声磁粒研磨装置，在辅助磁极外表面包裹一层聚氨酯，构成超声振动抛光装置。结果 对上述的超声磁粒复合研磨阶段进行响应面优化，在主轴转速、振动频率、粒径三个变量中，保持其中一个变量不变，另外两个变量组合，使表面粗糙度值达到最低。选用最优的工艺参数组合作为第一阶段主要参数，经40 min研磨，表面粗糙度值从原始的4.40 μm下降到0.19 μm。在第一阶段基础上进行第二阶段抛光，经5 min抛光，表面粗糙度值从0.19 μm进一步下降到0.07 μm。结论 通过响应面优化得到最优超声磁粒复合研磨组合为：主轴转速1000 r/min、粒径250 μm、振动频率20 kHz。经超声磁粒复合研磨与超声振动复合抛光两个阶段加工后，玻璃管内表面存在的凹坑、突起及划痕均得到有效去除，表面更加均匀、平整。

The work aims to explore the possibility to process the inner surface of the quartz glass tube in two experimental stages of ultrasonic magnetic particle composite grinding and ultrasonic vibration compound polishing to obtain the optimum combination of process parameters. A cylindrical radial magnetizing auxiliary pole was added in the quartz glass tube and ultrasonic vibration was added to form a composite finishing device. An ultrasonic magnetic particle lapping device was formed by wrapping a layer of abrasive particles on the auxiliary magnetic pole surface, and an ultrasonic vibration polishing device was formed by wrapping a layer of polyurethane on the outer surface of the auxiliary magnetic pole. The response surface was optimized in the above mentioned ultrasonic magnetic particle complex grinding stage. Among the three variables of spindle speed, vibration frequency and particle diameter, one of the variables was kept unchanged, and the other two variables were combined to minimize the surface roughness. The best combination of process parameters was selected as the main parameter in the first stage. After 40 min grinding, the surface roughness decreased from 4.40 μm to 0.19 μm. On the basis of the first stage, the polishing of the second stage was carried out for 5 min, and the surface roughness decreased from 0.19 μm to 0.07 μm. Through response surface optimization, the best combination of ultrasonic particle and magnetic abrasive finishing is obtained: spindle speed of 1000 r/min, particle size of 250 μm, and vibration frequency of 20 kHz. After two stages of ultrasonic magnetic particle compound grinding and ultrasonic vibration compound polishing, the pits, protrusion and scratches in the inner surface of the glass tube are effectively removed, and the surface is more uniform and smooth.