目的 为进一步提高电弧离子镀TiAlN薄膜的摩擦磨损性能，研究添加元素Y对CrNi3MoVA钢表面电弧离子镀TiAlN薄膜微观组织结构、硬度、弹性模量及摩擦磨损性能的影响。方法 采用Ti-50Al和Ti-49Al-2Y合金靶，利用电弧离子镀技术在CrNi3MoVA钢表面制备两种氮化物薄膜，利用纳米压痕仪和摩擦磨损试验机分别测试了两种薄膜的硬度、弹性模量和摩擦系数，并用SEM、TEM、EDS、GIXRD分析了两种薄膜磨损前后的形貌、成分、相结构。结果 添加Y降低了TiAlN薄膜的晶粒尺寸，使其由柱状晶结构转变为近似等轴晶结构。TiAlYN薄膜的硬度较TiAlN薄膜提高了约25%，其弹性模量与TiAlN薄膜相近。与Si3N4对磨时，在加载载荷为20 N、往复行程为10 mm、往复速率为400 r/min的条件下，TiAlN薄膜的稳定摩擦系数为0.70~0.75，而TiAlYN薄膜的稳定摩擦系数为0.60~0.65，TiAlYN薄膜的磨损率较TiAlN薄膜的磨损率减小了约47%。TiAlN薄膜与TiAlYN薄膜的主要磨损机制均为刮擦磨损，TiAlN薄膜的失效机制主要是脆性裂纹导致的剥落。结论 添加Y对TiAlN薄膜具有明显的减摩耐磨作用，并提高了TiAlN薄膜在摩擦磨损过程中的抗开裂和抗剥落性能。

This work aims to further increase performance of friction and wear of arc ion plated TiAlN film, and study the influence of element Y on microstructure, hardness, elasticity modulus and friction and wear performance of arc ion plated TiAlN film on CrNi3MoVA steel. Two nitride films were prepared on CrNi3MoVA steel by arc ion plating technology with Ti-50Al and Ti-49Al-2Y (at.%) alloy targets. The hardness, elasticity modulus and friction coefficient of the two films were tested by the nanoindentor and the friction and wear testing machine, respectively. Then the morphologies, composition and phase structure before and after wearing were analyzed by scanning electron microscopy (SEM), transmission electron microscope (TEM), energy dispersive X-ray spectrum (EDS) and grazing incidence X-Ray diffraction (GIXRD). Y reduced the grain size of the TiAlN film and made the TiAlN film transform from the columnar microstructure to the nearly equiaxed one. The hardness of the TiAlYN film was about 25% more than that of the TiAlN film and the elasticity modulus of the TiAlYN film was close to that of TiAlN film. When the Si3N4 ball was used as one of the friction pair under the wear condition that the load was 20 N, the reciprocating travel was 10 millimeter and the velocity was 400 rounds per minute, the steady friction coefficient of the TiAlN film was 0.70~0.75, while that of the TiAlYN film was 0.60~0.65. The wear rate of the TiAlYN film was about 47% less than that of the TiAlN film. The wear mechanism of both the TiAlN film and the TiAlYN film was mainly characterized as scrape abrasion, and the failure mechanism of the TiAlN film was mainly the spalling caused by brittle cracks. The Y added in TiAlN film has a significant function of antifriction and wear resistance, and increases the cracking and spalling resistance of the TiAlN film in the course of frictional wear.