MoS2/Pb-Ti多层薄膜的结构和摩擦学性能

赵晓宇, 张广安, 王立平, 薛群基

表面技术 ›› 2018, Vol. 47 ›› Issue (10) : 97-106.

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表面技术 ›› 2018, Vol. 47 ›› Issue (10) : 97-106. DOI: 10.16490/j.cnki.issn.1001-3660.2018.10.013
表面摩擦磨损与润滑

MoS2/Pb-Ti多层薄膜的结构和摩擦学性能

  • 赵晓宇1, 张广安2, 王立平3, 薛群基4
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Structure and Tribological Properties of MoS2/Pb-Ti Multilayer Films

  • ZHAO Xiao-yu1, ZHANG Guang-an2, WANG Li-ping3, XUE Qun-ji4
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摘要

目的 设计MoS2/Pb-Ti多层薄膜,改善真空和大气环境下的摩擦学性能。方法 采用磁控溅射技术沉积MoS2/Pb-Ti多层薄膜,通过扫描电镜(SEM)、X射线衍射(XRD)、纳米压痕仪、真空和大气摩擦磨损实验,分别评价MoS2/Pb-Ti多层薄膜的表面形貌、微观结构、力学性能、真空和大气环境下的摩擦学性能,并通过光学显微镜、能谱仪(EDS)、Raman光谱仪对磨痕及磨斑进行分析。结果 随着MoS2层厚度的增加,MoS2/Pb-Ti多层薄膜的表面颗粒逐渐细化,变得更加光滑。同时,微观结构由金属相主导转变为由MoS2相主导,弹性模量逐渐降低,硬度则先升高后降低。在真空环境下,MoS2/Pb-Ti多层薄膜的摩擦系数低至0.01,磨损率低至2.2×10?7 mm3/(N?m),大气环境下摩擦系数低至0.07左右,磨损率低至2.7×10?7 mm3/(N?m)。 结论 在真空摩擦磨损实验中,MoS2层厚度过薄时,MoS2/Pb-Ti多层薄膜的磨损机制为粘着磨损,MoS2层厚度增加有助于形成稳定的转移膜,使得摩擦磨损大幅降低。在大气摩擦磨损实验中,Ti保护MoS2的结构免于H2O和O2的破坏,使体系具有低而稳定的摩擦磨损。

Abstract

The work aims to design MoS2/Pb-Ti multilayer films and improve tribological properties in vacuum and air. MoS2/Pb-Ti multilayer films were deposited by magnetron sputtering technology. The surface morphology, microstructure, me-chanical properties, vacuum and atmospheric tribological properties of the MoS2/Pb-Ti multilayer films were evaluated by scanning electron microscopy (SEM), X-ray diffraction (XRD), nanoindenter, vacuum and atmospheric tribological tests, respectively. Optical microscope, energy dispersive spectrometer (EDS), and Raman spectrometer were used to analyze wear tracks and scars. As the thickness of MoS2 layer increased, the surface of MoS2/Pb-Ti multilayer film gradually refined and became much smoother. Meanwhile, the microstructure changed from the metal phase to the MoS2 phase-dominated structure. The elastic modulus of MoS2/Pb-Ti multilayer films decreased gradually with the increase in MoS2 layer, while the hardness increased first and then decreased. In vacuum, the friction coefficient of MoS2/Pb-Ti multilayer film was as low as 0.01, and the wear rate was as low as 2.2×10?7 mm3/(N?m). In air, the friction coefficient was as low as 0.07, and the wear rate was as low as 2.7×10?7 mm3/(N?m). In vacuum, when the thickness of MoS2 layer was too thin, the wear mechanism of MoS2/Pb-Ti multilayer film was adhesive wear. The increase in the thickness of MoS2 layer contributed to forming a stable transfer film, leading to significantly reduced friction and wear. In air environment, Ti protected the structure of MoS2 from the attack of H2O and O2, resulting in low and stable friction and wear.

关键词

MoS2;多层薄膜;真空;潮湿;摩擦;磨损

Key words

MoS2; multilayer films; vacuum; humidity; friction; wear

引用本文

导出引用
赵晓宇, 张广安, 王立平, 薛群基. MoS2/Pb-Ti多层薄膜的结构和摩擦学性能[J]. 表面技术. 2018, 47(10): 97-106
ZHAO Xiao-yu, ZHANG Guang-an, WANG Li-ping, XUE Qun-ji. Structure and Tribological Properties of MoS2/Pb-Ti Multilayer Films[J]. Surface Technology. 2018, 47(10): 97-106

基金

国家自然科学基金(21373249, 51322508);材料腐蚀与防护四川省重点实验室开放基金项目(2015CL10)

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