目的 针对HIPSN（热等静压氮化硅）陶瓷精密加工效率低、成本高、难度大的问题，对HIPSN陶瓷高效精密磨削加工工艺进行优化。方法 利用高精度成形磨床对HIPSN陶瓷进行试验，分析砂轮线速度、磨削深度、工件进给速度等工艺参数对磨削后表面质量的影响规律。结果 磨削深度由0.005 mm增加到 0.050 mm，表面粗糙度值由0.2773 μm减小到0.2198 μm，并趋于稳定；工件进给速度由1000 mm/min增加到15 000 mm/min，表面粗糙度值由0.2454 μm减小到0.2256 μm，之后增大到0.2560 μm，并趋于稳定；砂轮线速度由20 m/s增加到50 m/s，表面粗糙度值由0.2593 μm减小到0.2296 μm。随着工件进给速度的增大，表面波纹度平均间距Sw由0 mm直线增加到5.90 mm；随着砂轮线速度的提高，平均间距Sw由2.33 mm直线减小到0.68 mm。优化工艺参数组合：砂轮线速度50 m/s，磨削深度0.030 mm，工件进给速度3000 mm/min。结论 表面粗糙度值与磨削深度和砂轮线速度呈负相关，随着工件进给速度的增大，表面粗糙度值先减小后增大，之后趋于稳定。减小工件进给速度、提高砂轮线速度有助于改善表面波纹度。

The work aims to optimize the HIPSN ceramic highly efficient and precision grinding process in order to solve low efficiency, high cost and high difficulty of HIPSN ceramic precision machining. High-precision ORBIT36CNC forming grinder was used to test HIPSN ceramics, and analyze the influence of process parameters such as grinding wheel speed, grinding depth and workpiece feed rate on the surface quality of workpiece. The grinding depth increased from 0.005 mm to 0.050 mm and the surface roughness decreased from 0.2773 μm to 0.2198 μm and then tended to be stable. The workpiece feed rate increased from 1000 mm/min to 15 000 mm/min. The surface roughness decreased from 0.2454 μm to 0.2256 μm, then increased to 0.2560 μm, and finally tended to be stable. The linear velocity of grinding wheel increased from 20 m/s to 50 m/s, and the surface roughness decreased from 0.2593 μm to 0.2296 μm. As the workpiece feed rate increased, the average gap Sw of surface waviness increased to 5.90 mm from 0 mm, while with the increase of linear velocity of grinding wheel, the average gap Sw decreased to 0.68 mm from 2.33 mm. Optimized process parameters included wheel speed of 50 m/s, grinding depth of 0.030 mm and workpiece feed rate of 3000 mm/min. The surface roughness negatively correlates to the grinding depth and the linear velocity of grinding wheel and decreases firstly and then increases as the workpiece feed rate increases and finally tends to be stable. Decreasing the workpiece feed rate and increasing the linear velocity of grinding wheel can improve the surface waviness.