目的 研究不同加热温度对Ni-P/Ti/DLC多层膜力学性能的影响。方法 用化学镀镍磷工艺在模具钢基体上镀Ni-P层作切削层，采用过滤阴极真空电弧（FCVA）技术分别沉积Ti过渡层和DLC保护层。利用拉曼光谱分析了多层膜表层在不同加热温度下的结构成分，采用纳米压痕、纳米划痕和扫描电镜对多层膜的硬度和弹性模量、膜层结合性能以及划痕表面形貌进行了表征。结果 拉曼光谱检测结果表明，随着加热温度的升高，多层膜表层DLC膜中的AD/AG值及sp2键含量增大，且400 ℃时AD/AG值的变化幅度明显增大。纳米压痕实验结果表明，多层膜的硬度和弹性模量随着温度的升高呈先增后减的趋势，且在300 ℃时达到最大，纳米压痕过程中膜层未出现破裂现象。纳米划痕实验及SEM观测结果表明，多层膜的临界载荷A1随着加热温度的升高而增加，临界载荷A2在25~200 ℃区间没有明显变化，而在300~400 ℃区间显著增大。结论 在加热温度达到400 ℃时，多层膜表层DLC膜的石墨化倾向显著。加热温度为300 ℃时，多层膜的力学性能及膜层间的结合性能较优，而400 ℃时膜层间的结合性能及抑制裂纹扩展能力减弱，且膜层具有较大的塑性。因此，适宜的加热温度有利于提高多层膜的力学性能和膜层间的结合性能。

The work aims to study effects of different heating temperature on mechanical properties of Ni-P/Ti/DLC multilayer films. Ni-P layer was prepared on die steel substrates by adopting electroless nickel-phosphate plating process, and Ti transition layer and DLC protective layer were deposited by adopting filtered cathodic vacuum arc (FCVA) technology. Composition of the multilayer films at different heating temperature was analyzed with Raman spectrometer, Hardness, elastic modulus, adhesion, and scratch morphology of the multilayer films were characterized with nano indentor, nano scratch tester and SEM. The results of Raman spectrometer showed that AD/AG value and sp2 content of DLC film on the multilayer films increased as heating temperature rose, and variation amplitude of AD/AG increased obviously at 400 ℃. The results of nano indention test showed that both hardness and elastic modulus of multilayer films first increased and then decreased as heating temperature rose, and reached the peak at 300 ℃. The films did not fracture during nanoindentation. The results of nano scratch test and SEM showed that critical load A1 of multilayer films increased as heating temperature rose; critical load A2 did not change obviously in the range of 25~200 ℃, but it increased significantly in the range of 300~400 ℃. Graphitization of DLC layer is remarkable at 400 ℃; mechanical properties and layer adhesion properties of multilayer films are better at 300 ℃; layer adhesion properties and crack growth inhibition weaken at 400 ℃, and layers exhibit greater plasticity, hence suitable heating temperature contributes to higher mechanical properties and layer adhesion properties of multilayer films.