目的 研究ITO/WO3/LiTaO3/NiOx/Al反射式无机全固态薄膜中WO3薄膜在高温环境中的性能退化机理。方法 采用直流反应磁控溅射法制备电致变色器件和WO3单层薄膜，并进行高温加热试验。对电致变色整体器件进行反射率变化量的测试，对WO3薄膜进行微观结构分析和电化学循环特性分析。结果 电致变色器件经不同温度加热后，350 ℃以下，反射率变化量下降不明显，350 ℃以上反射率变化量明显降低，WO3薄膜发生了非晶结构向晶体结构的转变。WO3薄膜的电化学循环特性为：随着加热温度的升高，电致变色响应时间增大，350 ℃以上，响应时间急剧增大，电致变色性能降低明显，但电致变色循环稳定性更好。结论 WO3薄膜疏松多孔的非晶结构能提供更多的离子（电子）注入和传输通道，电致变色性能更好，但疏松多孔结构循环稳定性较差。致密的晶体结构因通道闭合，离子（电子）不易注入和传输，电致变色性能较差，但致密结构循环稳定性较好。

The work aims to study performance degradation mechanism of WO3 film in ITO/WO3/LiTaO3/NiOx/Al reflective inorganic all-solid-state films at high temperature. Electrochromic device and WO3 monolayer film were deposited in the method of DC magnetron sputtering and heated at high temperature. Reflectance variations of the electrochromic device were tested. Microstructure and electrochemical cycle performance of WO3 film were analyzed. The reflectance variation decreased little at temperature below 350 ℃, and decreased obviously at the temperature over 350 ℃. WO3 film transformed from amorphous to crystal structure. The electrochemical cycle characteristic showed that the electrochromic response time extended as heating temperature increased, response time soared and electrochromic property degenerated at the temperature below 350 ℃ while electrochromic stability increased. The porous amorphous structure of WO3 film can provide more injection and transmission routes for ions, electrochromic property is better while cycling stability of porous amorphous structure is worse. Electrochromic property of compact crystal structure is worse since routes are closed and ions (electrons) cannot be injected or transmitted easily, but its cycling stability is better.