目的 研究皮秒激光加工工艺参数对微凹坑形貌的影响规律。方法 采用FSLAB-50-05激光器搭建的激光器平台对TC11钛合金工艺试样进行表面微加工，通过WYKO—NT1100型表面三维形貌测试仪获得表面微凹坑织构形貌，分别记录微加工后的二维与三维形貌图，应用单因素法分析激光重复频率、激光持续时间和激光功率对微凹坑形貌的影响规律。结果 在激光功率为10 W、激光持续时间为0.12 ms的前提下，当激光重复频率由50 kHz增加到250 kHz时，微凹坑的直径和深度均呈现出先增大后减小的趋势；在激光功率为10 W、激光重复频率为300 kHz的前提下，当激光持续时间由0.02 ms增加到0.10 ms时，微凹坑直径和深度均随着激光持续时间的增加而变大；在激光重复频率为300 kHz、激光持续时间为0.12 ms的前提下，当激光功率由4 W提升至12 W时，微凹坑的深度随着激光功率的增大而增大，而宽度先增大后减小。结论 皮秒激光微凹坑织构较佳的工艺参数范围为：激光重复频率150~200 kHz，激光持续时间0.04~0.06 ms，激光功率8~10 W。

The work aims to study law of influence of picosecond laser processing parameters on micro-dimple morphology. Surface micromachining was performed to TC11 titanium alloy process sample on a laser platform consisting of FSLAB-50-05 laser. Morphology of surface micro-dimple texture was observed with WYKO-NT1100 surface 3D morphology tester. 2D and 3D morphology of the micromachined texture was recorded, respectively. Law of influence of laser repetition frequency, laser duration and laser power on micro-dimple morphology was analyzed in single factor method. Provided with laser power of 10 W and laser duration of 0.12 ms, diameter and depth of the micro-dimples tended to first increase and then decrease as laser repetition frequency increased from 50 kHz to 250 kHz; provided with laser power of 10 W and laser repetition frequency of 300 kHz, the diameter and depth of micro-dimples increased with the increase of laser duration as the laser duration increased from 0.02 ms to 0.10 ms; provided with laser repetition frequency of 300 kHz and laser duration of 0.12 ms, depth of micro-dimples increased with the increase of laser power while width first increased and then decreased as laser power increased from 4 W to 12 W. Optimum process parameters of picosecond laser micro-dimple texture are: repetition frequency of 150 kHz to 200 kHz, laser duration of 0.04 ms to 0.06 ms, and laser power of 8 W to 10 W.