目的 通过在TiSiN涂层中掺杂软金属Cu，提高TiSiN涂层的摩擦性能。方法 采用多弧离子镀技术，在316L不锈钢基体上沉积TiSiN-Cu涂层。用扫描电子显微镜（SEM）观察涂层的表面形貌，用X射线光电子能谱仪（XPS）和X射线衍射仪（XRD）来分析涂层的元素组成和相组成，通过纳米压痕硬度测试和摩擦磨损实验，表征不同Cu含量TiSiN-Cu涂层的力学性能和摩擦学性能。结果 Cu含量对TiSiN涂层的结构、硬度和摩擦性能有明显影响。Cu在涂层中主要以单质形式存在，由于与空气接触，涂层表面有少量的CuO。随着Cu含量的增加，TiN的晶粒尺寸先减小后增加，硬度先升高后降低。在Cu原子数分数为6.28%时，硬度达到最大值29.26 GPa。在干摩擦条件下，TiSiN-Cu涂层的磨损率在Cu原子数分数为12.93%时达到最低，为6.65×10?7 mm3/(N?m)。在海水环境下，涂层的磨损率较大。结论 软金属Cu作为固体润滑颗粒可以明显改善TiSiN涂层的干摩擦性能，在海水条件下，摩擦与腐蚀的交互作用加速了涂层材料的损耗。

The work aims to improve tribological properties of TiSiN-Cu coating by doping the coating with soft metal Cu. TiSiN-Cu coating was deposited on 316L stainless steel by adopting multi-arc ion plating technology. Surface morphology of the coating was observed with scanning electron microscopy (SEM). Element composition and phase structure of the coating was analyzed with X-ray photoelectron spectrometer (XPS) and X-ray diffractometer (XRD), respectively. Mechanical properties and tribological properties of TiSiN-Cu coatings with different Cu contents were characterized with nano indentation hardness test as well as friction and wear test. Cu content had great influences on microstructure, hardness and tribological properties of the TiSiN-Cu coatings. Copper existed in the form of elementary substance. There was a little CuO on the surface of coatings owing to exposure to air. As the Cu content increased, grain size of TiN first decreased and then increased, the hardness first increased and then decreased. When the Cu content was 6.28 at.%, the hardness reached 29.26 GPa. Under dry friction conditions, the wear rate was 6.65×10?7 mm3/(N?m) (the minimum) when Cu content was 12.93 at.%. However, the wear rate was higher in seawater environment. Soft metal Cu can significantly improve the dry friction of the TiSiN coating as solid lubrication particle. However, the interaction of friction and corrosion can accelerate wear of the coatings in seawater.