近年来，随着工业的发展，机器零部件的应用面临了新的挑战，关键零部件的磨损腐蚀导致的涂层失效变得尤为显著。Ti基涂层因其低摩擦系数、硬度高、耐磨性好且具有优异的耐蚀性，逐渐受到了业界的关注。综述了物理气相沉积TiSiC、TiCN、TiSiN和TiSiCN硬质涂层结构和性能的研究现状。简要总结了Ti基涂层发展的历程，重点分析和对比了四种硬质涂层的成分、结构特点、硬度、结合强度、耐磨减摩性能和耐腐蚀性能，对于不同方法制备的涂层的影响因素分别做了分析，并对涂层的不同失效方式做了解释。从微观结构和性能两方面对涂层进行描述，阐明了硬质涂层中碳的键结构和相结构变化与涂层减摩自润滑性能之间的本构关系，指出了碳元素的石墨化转变在涂层减摩方面的重要作用。论述了钛基硬质涂层结构诱导超硬现象的机制，归纳和评估了超硬耐磨减摩涂层的特点。最后，对目前国内外Ti基涂层研究所存在的问题进行了总结，展望了物理气相沉积钛基多元多界面硬质涂层的发展方向和前景。

In recent years, with the development of industries, the application of machine parts is faced with new challenges. The coating failure of the key parts resulting from the abrasion and corrosion is particularly significant. Titanium-based coatings are getting more attention because of its low friction coefficient, high hardness, good wear resistance and excellent corrosion resistance. The research status of structure and property of the TiSiC, TiCN, TiSiN and TiSiCN hard coatings prepared by physical vapor deposition are summarized. The development of Ti-based coating is briefly summarized, and the structural characteristics, hardness, adhesive strength, anti-friction performance, wear resistance and corrosion resistance of the four kinds of hard coatings are emphatically analyzed and compared. The influence factors of coatings produced by different methods are analyzed and the different failure modes of the coating are explained. The coating is described from the perspective of microstructure and performance. The constitutive relationship between the change in the bond structure and phase structure of the carbon in the hard coating and the anti-friction, self-lubricating performance of the hard coating is illustrated. Based on that, the important role of carbon graphitization plays in the anti-friction performance of the coating is pointed out. The mechanism of structure-induced super hard phenomenon of titanium-based hard coatings is discussed. The characteristics of the super-hard wear-resistant and anti-friction coatings are concluded and evaluated. Finally, the problems currently existing in Ti-based coating research at home and abroad are summarized and the development direction and prospects of the titanium-based multi-element and multi-interface hard coatings by physical vapor deposition are envisaged.