目的 提高高速钢的干摩擦学性能，探究不同Ti含量掺杂对类石墨碳膜摩擦性能的影响。方法 用非平衡磁控溅射离子镀技术制备了不同Ti含量的类石墨碳膜，用光学显微镜、扫描电子显微镜、Raman光谱、洛氏硬度计、纳米压痕仪等分析薄膜的微观结构和力学性能，用高速线性往复磨损试验机检测薄膜的干摩擦学性能，并用光学显微镜观察磨痕。结果 制备的碳膜表面颗粒尺寸较小，断面致密，且逐渐趋向柱状结构。随着Ti靶溅射电流的增大，逐渐增加的Ti元素打断了sp3键生长，薄膜中生成更稳定的sp2键，且sp2键含量先增大后减小，在0.8 A达到最大，溅射电流为1.1 A时，Ti元素含量最大，sp2键和sp3键都减少。碳膜与基体结合力随着Ti靶电流变大而先增大后减小，在0.8 A结合最佳，约为HF3级。硬度和弹性模量先减小后增加，0.8 A时达到最小。碳膜摩擦系数相比于原样都较低，在0.09～0.12之间。磨损率先增大后减小，维持在(5~15)×10?16 m3/(N?m)左右。结论 不同Ti含量的类石墨碳膜，能明显降低高速钢与钢球对磨的粘着磨损倾向，降低摩擦系数和磨损率。

The work aims to improve dry tribological property of high speed steel and study influence of different Ti content on tribological property of graphite-like carbon films. Graphite-like carbon films of different Ti content were fabricated with unbalanced magnetron sputtering ion plating technology. Microstructures and mechanical properties of the films were characterized with optical microscope, scanning electron microscopy, Raman spectrometer, Rockwell hardness tester and nanoindentor. Dry tribological properties of the films were detected with high-speed linear reciprocating abrasion testing machine. Grinding cracks were observed with optical microscopy. The prepared carbon film surface particles were in small size, the cross section was compact and tended to be columnar structure. With the increase of Ti target sputtering current, the increasing Ti element interrupted growth of sp3 bond, leading to the generation of more stable sp2 bond. The sp2 bond content first increased and then decreased, reaching the maximum at 0.8 A. At the current of 1.1 A, Ti content reached the maximum, both the sp2 bond and sp3 bond decreased. Adherence between the carbon film and substrate first increased and then decreased as Ti target current increased, reaching the optimum value (of about grade HF3) at 0.8 A. Hardness and elastic modulus first decreased and then increased, reaching the minimum at 0.8 A. Friction coefficient of the carbon films was lower than that of M42, ranging from 0.09 to 0.12. Wear rate first increased and then decreased, maintaining at nearly (5~15)×10?16 m3/(N?m). Graphite-like carbon films of different Ti content can reduce adhesive wear caused by mutual abrasion between high speed steel and steel ball significantly, therefore decreasing the friction coefficient and wear rate.