目的 通过直流反应磁控溅射系统在304不锈钢基体上成功制备了含铁类金刚石薄膜，并研究该含铁类金刚石薄膜的润湿性及抗腐蚀行为。方法 通过扫描电镜、拉曼光谱仪、原子力显微镜，分别对含铁类金刚石薄膜的结构和形貌进行分析，利用静态接触角测量分析了所制备薄膜的润湿性，且采用动电位极化对有无薄膜沉积的不锈钢体系进行了腐蚀行为测试。结果 所制备薄膜具有典型的类金刚石的非晶结构。随着制备过程中甲烷流量的减小，薄膜中sp3碳含量降低，薄膜致密度逐渐降低。随着甲烷流量的降低，薄膜表面的疏水性能逐渐减小，且自腐蚀电位向负向偏移，腐蚀电流密度逐渐增大。结论 含铁类金刚石薄膜能明显提高不锈钢表面的疏水性能和抗腐蚀性能。

The work aims to prepare iron-containing diamond-like film (Fe-DLC) on 304 stainless steel substrate by DC reactive magnetron sputtering system and study wettability and corrosion resistance of the iron-containing diamond-like film. Structure and morphology of the Fe-DLC film were characterized by SEM, Raman and AFM respectively. Wettability of the Fe-DLC film was analyzed by static contact angle measurement, and the corrosion behavior of the Fe-DLC film and uncoated Fe-DLC sample in 3.5wt% NaCl solution was tested by means of potentiodynamic polarization technique. The prepared Fe-DLC film had typical diamond-like amorphous structure and flow rate of methane significantly affected the morphology and structure of the films during the process of preparation. The sp3 carbon content in the film decreased and film compactness decreased gradually as the flow rate of methane reduced during the process of preparation. Hydrophobic property of the film surface decreased gradually, self-corrosion potentials shifted to more negative values and the corrosion current density increased as the flow rate of methane reduced. The hydrophobic property and corrosion resistance performance of 304 stainless steel surface can be improved by iron-containing diamond-like film.