目的 改善钛合金表面抗微动磨损性能。方法 利用非平衡磁控溅射技术在钛合金表面沉积MoS2-Ti/Cu-Ni-In多层固体润滑膜，并与MoS2-Ti与Cu-Ni-In单层固体润滑膜进行对比。利用扫描电镜、显微硬度计、摩擦磨损试验机、表面轮廓仪对固体润滑薄膜的形貌、硬度、抗微动磨损性能、磨痕形貌进行分析测试。结果 所制备的Cu-Ni-In单层膜与MoS2-Ti单层膜结构致密，与基体结合良好，MoS2-Ti/Cu-Ni-In多层膜交替结构清晰，结构致密。MoS2-Ti/Cu-Ni-In多层膜的硬度大于MoS2-Ti及Cu-Ni-In单层膜，多层膜的平均微动系数为0.06，MoS2-Ti单层膜的平均微动系数为0.102，Cu-Ni-In单层膜的平均微动系数大于1.0。在12 000个微动循环周期后，测得MoS2-Ti/Cu-Ni-In多层膜的最终磨损总量为0.045 mm3，Cu-Ni-In单层膜的最终磨损总量为37.79 mm3，MoS2-Ti单层膜的最终磨损总量为0.296 mm3，即多层膜的抗微动磨损性能较Cu-Ni-In单层膜改善了2个数量级，较MoS2-Ti单层膜改善了5倍以上。结论 MoS2-Ti/Cu-Ni-In多层膜中的多个界面对单层晶粒生长起到了阻挡作用，从而致使交替结构中的单层晶粒得到细化，Cu-Ni-In膜的引入延缓了MoS2-Ti膜的剥落及其转移，增加了不锈钢球与多层膜间第三体的润滑及减磨效果，多层膜表现出了优异的抗微动磨损性能。

The work aims to improve the fretting wear resistance of titanium alloy surface. MoS2-Ti/Cu-Ni-In multilayer solid lubricating films were deposited on the surface of titanium alloy by non-balanced magnetron sputtering technique, and were compared with MoS2-Ti and Cu-Ni-In monolayer solid lubrication films. The morphology, hardness, fretting wear behavior and wear scar of solid lubrication films were analyzed by scanning electron microscope, micro hardness tester, friction wear tester and surface profile instrument. The prepared Cu-Ni-In and MoS2-Ti monolayer films structure was clear and had good adhesion to substrate. Alternating structure of MoS2-Ti/Cu-Ni-In multilayer films was clear and the structure was compact. The hardness of MoS2/Cu-Ni-In multilayer films was higher than that of MoS2-Ti and Cu-Ni-In monolayer films. Average fretting coefficient of MoS2-Ti/Cu-Ni-In multilayer films was 0.06, average fretting coefficient of MoS2-Ti monolayer films was 0.102 and average coefficient of Cu-Ni-In monolayer films was more than 1.0. After 12,000 fretting cycles, final wear amount of the MoS2-Ti/Cu-Ni-In multilayer films was 0.045 mm3, Cu-Ni-In monolayer films 37.79 mm3 and MoS2-Ti monolayer films 0.296 mm3. The fretting wear volume of multilayer films has improved by 2 orders of magnitude compared with that of Cu-Ni-In monolayer films, and by more than 5 times compared with that of MoS2-Ti monolayer films. Several interfaces in MoS2-Ti/Cu-Ni-In multilayer suppress growth of monolayer grain, thus refining monolayer grain in the alternating structure. The introduction of Cu-Ni-In films into the MoS2-Ti/Cu-Ni-In multilayer films delays peeling off and transfer of the MoS2-Ti films, and has enhanced the lubrication and anti-friction effect of the third body between stainless steel ball and the multilayer films. The multilayer films showed excellent fretting wear resistance.