目的 改善MoS2薄膜的疏松结构，提高其硬度及摩擦磨损性能。方法 采用离子源辅助磁控溅射技术在GCr15基体上沉积不同Zr含量的MoS2-Zr复合薄膜，通过SEM分析薄膜的表面及截面形貌。采用EDS检测薄膜的成分，采用显微维氏硬度计测试薄膜的硬度，采用Rockwell-C硬度计进行压痕测试实验，采用球-盘式旋转摩擦磨损试验机评价薄膜的摩擦磨损性能。结果 MoS2-Zr复合薄膜的致密程度和硬度随着Zr含量的增加而增大，其硬度值为300~500HV。复合薄膜与基体的结合力随着Zr含量的增加而增强，但当Zr含量过高时，结合力下降。含Zr原子数分数为15%的MoS2-Zr复合薄膜具有最好的摩擦学性能，其平均摩擦系数为0.09，磨损率为9.33×107 mm3?N–1?m–1，耐磨寿命达5.25×105 r。结论 Zr的掺杂改善了纯MoS2薄膜的疏松结构，提高了MoS2薄膜的硬度和结合力，合适的Zr掺杂可以获得较低的摩擦系数和较长的耐磨寿命。

The work aims to improve loose structure, hardness, friction and wear properties of MoS2 films. MoS2-Zr composite films with different Zr content were deposited on GCr15 substrate by ion assisted magnetron sputtering technology. Morphology of surface and cross section of films was analyzed by SEM; composition was determined by EDS; hardness by Micro Vickers tester; indentation test was performed by Rockwell-C hardness tester; friction and wear properties of the films were evaluated by ball-disk rotating friction and wear tester. The compactness and hardness of MoS2-Zr composite films increased with the increase of Zr content with hardness value ranging from 300~500HV. The adhesion strength between composite film and substrate increased with the increase of Zr content and decreased in case of excessive Zr content. The MoS2-Zr composite films with 15 at.% Zr content showed the best tribological properties, their average friction coefficient was 0.09, wear rate 9.33×107 mm3?N–1?m–1 and wear life 5.25×105 r. Loose structure, hardness and adhesion strength of MoS2-Zr composite films were improved. Lower friction coefficient and longer wearing life can be obtained provided with appropriate Zr doping content.