目的 探究湿度和加载载荷对氮化高速钢基体上沉积掺钨类金刚石薄膜的摩擦磨损性能的影响。方法 通过非平衡磁控溅射技术在氮化处理后的高速钢基体上制备了掺钨类金刚石（W-DLC）薄膜。利用纳米压痕仪和划痕实验检测了薄膜的硬度和结合力，通过摩擦磨损实验检测了不同湿度（30%和 60%）和不同载荷（10、 20、 30、 40 N）条件下薄膜的摩擦系数和磨损率，利用扫描电子显微镜对摩擦磨损后的形貌与成分进行了观察与分析，并利用拉曼光谱对磨屑的结构进行了分析。 结果 在湿度为 30%和60%的条件下，薄膜的摩擦系数均随着摩擦载荷的增加呈现先增加后降低的规律，且在载荷为 30 N 取得最小值；磨损率均随着载荷的增大而增加，且湿度为 60%条件下薄膜的磨损率大于湿度为 30%条件下的磨损率。 磨屑产物的拉曼光谱结果显示，摩擦过程导致薄膜发生石墨化转变，而载荷和湿度对磨屑结构的影响不大。 结论 高速钢基体进行离子氮化后，可以明显提高掺钨类金刚石薄膜的硬度和结合力。

Objective To investigate the influence of humidity and load on the tribological properties of W doped diamond-like carbon(W-DLC) film on nitrided high speed steel. Methods W-DLC film was deposited on the nitriding high speed steel by unbalanced magnetron sputtering. Hardness and adhesion were measured through nanoindentor and scratch test. Friction coefficient and wear rate under varied humidity (30% and 60%) and load (10 N, 20 N, 30 N and 40 N) were investigated by friction and wear test. Scanning electron microscope with energy dispersive spectrometer was used to observe the morphology and analyze the chemical composition after wear, and Raman spectroscopy was applied for the analysis of the structure of the debris. Results The hardness and adhesion of W-DLC film were both improved after the nitridation of HSS substrate. Under the humidity of 30% and 60%, the friction coefficient of the film tended to increase and then decrease with the increase of load, of which the maximum value was achieved under the load of 30 N. The wear rate was both in proportion to the load when the humidity was 30% and 60%. In addition, the wear rate under the humidity of 60% was greater than that of 30%. The Raman spectra of debris indicated graphitization of W-DLC after grinding, while load and humidity little effect on the structure of the debris. Conclusion Plasma nitriding of high speed steel substrate could significantly improve the hardness and adhesion of W doped diamond-like carbon films.