纳米压痕和划痕法测定 TiO2 纳米薄膜的力学性能

龙东平, 薛建荣, 晏智鑫

表面技术 ›› 2015, Vol. 44 ›› Issue (6) : 115-119.

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PDF(3970 KB)
表面技术 ›› 2015, Vol. 44 ›› Issue (6) : 115-119. DOI: 10.16490/j.cnki.issn.1001-3660.2015.06.022
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纳米压痕和划痕法测定 TiO2 纳米薄膜的力学性能

  • 龙东平1, 晏智鑫1, 薛建荣2
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Nanoindenation and Nanoscratch Measurements to Determine the Mechanical Properties of TiO2 Nano Films

  • LONG Dong-ping1, YAN Zhi-xin1, XUE Jian-rong2
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摘要

目的 研究相同工艺条件下阳极氧化法在不同钛合金基底(TA1,TC4,TC4F136)上生成的 TiO2薄膜的力学性能差异。 方法 采用扫描电镜结合原子力显微镜观察 3 种薄膜的形貌和结构,用 UNHT 型纳米压痕仪测试 TiO2 纳米薄膜的力学性能,利用纳米划痕法测试 3 种钛合金表面生成的 TiO2 薄膜与基底的结合强度及摩擦性能,用纳米压痕技术测试 TiO2 的显微硬度和弹性模量。 结果 电解液及其它电化学条件相同时,不同钛合金基底上形成的 TiO2 薄膜结构(管直径、管壁厚及管长度)不同。 结论 阳极氧化法在钛合金基底上生成的 TiO2 纳米薄膜的力学性能,由 TiO2 微观结构及其与基底的结合强度决定,微观结构和结合强度归根到底由合金中元素决定。

Abstract

Objective To determine the differences in mechanical properties of TiO2 nano-film prepared by the method of anodic oxidation on different titanium alloy surfaces (TA1, TC4, TC4F136) under the same processing conditions. Methods SEM and AFM were used to observe morphology and structure of these three kinds of samples. The UNHT nanoindentor was used to test the mechanical property of TiO2 nano-film, and nano scratch was performed to determine the adhesive strength and the friction property between TiO2 nano-films on the three titanium alloy surfaces and the substrate. Nanoindentation was used to test microhardness and elastic modulus of TiO2 nano-films. Results It showed that the structure (tube diameter, wall thickness and length) of TiO2 films formed on different titanium alloy substrate differed from each other although they were prepared in the same electrolyte and other electrochemical conditions. Conclusion The mechanical properties of TiO2 nano-films on titanium alloy substrates which are prepared by anodic oxidation depend on the micromorphology of TiO2 and its adhesive strength with the substrates which ultimately depend on the difference of elementary composition of those alloys.

关键词

钛合金; TiO2 薄膜; 力学性能; 纳米划痕; 纳米压痕

Key words

titanium alloy; TiO2 film; mechanical property; nanometer scratch; nanometer indentation

引用本文

导出引用
龙东平, 薛建荣, 晏智鑫. 纳米压痕和划痕法测定 TiO2 纳米薄膜的力学性能[J]. 表面技术. 2015, 44(6): 115-119
LONG Dong-ping, XUE Jian-rong, YAN Zhi-xin. Nanoindenation and Nanoscratch Measurements to Determine the Mechanical Properties of TiO2 Nano Films[J]. Surface Technology. 2015, 44(6): 115-119

基金

国家自然科学基金项目(51105385,31271057);中国博士后基金(2012M511397)

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