目的 采用多元等离子体注入与沉积(MPIIID)技术制备 Ti-Al-N 涂层,系统研究涂层的微观组织结构、力学性能与摩擦学特性。 方法 借助 XRD,XPS,SEM 和 TEM 等，观察分析Ti-Al-N 涂层的微观组织结构与物相组成,采用纳米压入试验仪、布氏硬度试验仪、摩擦磨损试验仪和激光共聚焦显微镜等测试分析 Ti-Al-N 涂层的力学性能、膜基结合力和摩擦磨损性能。 结果 Ti-Al-N 涂层表现出较高的膜-基结合强度。 Al 元素掺杂诱发 Ti-Al-N 涂层发生严重晶格畸变。 当 Al 原子数分数为 6. 18% 时,Ti-Al-N 涂层以 c-TiAlN 相结构为主,表现出超高硬度(达到 39. 83 GPa);随着 Al 元素含量增加,涂层中的软质h-TiAlN相结构增多,硬度随之下降。 摩擦试验结果表明,低 Al 含量 Ti-Al-N 涂层的抗磨损能力良好,其主要磨损机制为磨粒磨损;高 Al 含量 Ti-Al-N 涂层的抗磨损能力较差,其主要磨损机制倾向粘着磨损。结论 MPIIID 技术成功实现了 Ti-Al-N 涂层的低温制备与成分调控,低 Al 含量的 Ti-Al-N 涂层具有优良的力学性能和优异的抗磨损能力。

Objective To investigate the microstructural, mechanical and tribological properties of the Ti-Al-N coatings synthesized by multi-plasma immersion ion implantation and deposition (MPIIID). Methods The microstructure and phase composition of the as-deposited coatings were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The mechanical, bonding and tribological properties of the as-deposited coatings were investigated using nano-indentation technology, Brinell hardness tester, friction and laser scanning confocal microscope. Results Ti-Al-N coatings showed high adhesion strength with the substrate. Al incorporation induced a serious lattice distortion. Ti-Al-N coating with an Al content of 6. 18% was mainly composed of c-TiAlN phase and possessed a super hardness of about 39. 83 GPa. However, the soft h-TiAlN phase in the Ti-Al-N coating increased with the increasing Al content, which led to the continuous reduction in hardness of the Ti-Al-N coatings. Tribological test results showed that the Ti-Al-N coating with a low Al content exhibited excellent wear resistance and its wear mechanisms was defined as abrasive wear. However, the Ti-Al-N coating with a high Al content exhibited poor wear resistance and its wear mechanisms was defined as adhesive wear. Conclusion The multi-plasma immersion ion implantation and deposition (MPIIID) technique successfully realized the low temperature deposition and composition control of the Ti-Al-N coatings. Ti-Al-N coating with low Al content exhibited excellent mechanical and antiwear properties.