| WANG Wan-tang,ZHANG Bao-guo,ZHOU Jia-kai,LI Hao-ran,LI Ye.Synergistic Effect of Long-afterglow Phosphor Particles and Photocatalyst in Chemical Mechanical Polishing of SiC Wafers[J],51(9):251-259 |
| Synergistic Effect of Long-afterglow Phosphor Particles and Photocatalyst in Chemical Mechanical Polishing of SiC Wafers |
| |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.09.026 |
| KeyWord:silicon carbide chemical mechanical polishing photocatalysis long-afterglow phosphor particles material removal rate surface roughness |
| Author | Institution |
| WANG Wan-tang |
School of Electronic Information Engineering, Hebei University of Technology, Tianjin , China |
| ZHANG Bao-guo |
School of Electronic Information Engineering, Hebei University of Technology, Tianjin , China |
| ZHOU Jia-kai |
Institute of Photoelectronic Thin Film Devices and Technology of Nankai University, Tianjin , China |
| LI Hao-ran |
School of Electronic Information Engineering, Hebei University of Technology, Tianjin , China |
| LI Ye |
School of Electronic Information Engineering, Hebei University of Technology, Tianjin , China |
|
| Hits: |
| Download times: |
| Abstract: |
| The work aims to obtain a composite synergistic technology that can improve the efficiency of chemical mechanical polishing (CMP) of single crystal SiC wafers to meet the high-efficiency and low-cost processing requirements of single crystal SiC wafers and conduct in-depth research on its synergistic effect. The effects of the synergistic effect of LPPs and different photocatalysts on the material removal rate and surface roughness of SiC-CMP were studied through polishing experiments and atomic force microscope tests. Combined with scanning electron microscopy, ultraviolet-visible diffuse reflectance spectroscopy, photoluminescence spectroscopy and X-ray photoelectron spectroscopy, the synergistic mechanism of LPPs and photocatalysts was explored. Compared with traditional CMP conditions, when the polishing slurry "0.5wt.% LPPs + 0.5wt.% TiO2 + 1.5wt.% H2O2 + 2wt.% Al2O3 Ra) of the wafer decreased to 0.477 nm. However, when polishing SiC substrates with polishing slurry containing LPPs and ZrO2, neither MRR nor Ra was significantly improved. XPS tests showed that the synergistic effect of LPPs and photocatalyst enhanced the oxidation effect of polishing solution on SiC substrates. UV-vis and PL tests showed that the variability of the synergistic effect of LPPs and different photocatalysts was mainly related to their optical properties. Under photocatalysis, LPPs and TiO2 have a synergistic effect on the performance of SiC-CMP; however, LPPs and ZrO2 does not show a synergistic effect. That is, the synergistic effect of LPPs and photocatalysts can improve the performance of SiC-CMP, but the choice of photocatalyst needs to be considered in conjunction with the luminescence characteristics of LPPs. |
| Close |
|
|
|