| HE Nai-ru,LI Jian-hong,JIA Jun-hong,LIU Ning,YANG Jie,LIANG Hai-tao.Effect of Element Diffusion on Structure and Tribological Properties of Cr2O3 Ceramic Films Prepared by Multi-arc Ion Plating[J],51(9):91-101 |
| Effect of Element Diffusion on Structure and Tribological Properties of Cr2O3 Ceramic Films Prepared by Multi-arc Ion Plating |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.09.009 |
| KeyWord:multi-arc ion plating different substrates Cr2O3 film annealing element diffusion friction and wear |
| Author | Institution |
| HE Nai-ru |
School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an , China |
| LI Jian-hong |
School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an , China |
| JIA Jun-hong |
School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an , China |
| LIU Ning |
Xi'an Aerospace Composites Research Institute, Xi'an , China |
| YANG Jie |
School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an , China |
| LIANG Hai-tao |
School of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi'an , China |
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| Abstract: |
| The Cr2O3 ceramic films prepared by multi-arc ion plating possess a low friction coefficient, good wear resistant and oxidation resistance. Meanwhile, high temperature annealing could improve the mechanical properties of Cr2O3 films significantly. In previous work, we found that the metal elements in the substrate would diffuse to the film surface and oxidize to form a ternary metal oxide with lubricating property. Thus, in order to research the diffusion behaviours of the metal elements in the substrate, the effects of microstructure evolution of the substrates on the metal elements diffusion in high temperature, and the evolutions of morphologies, microstructure and tribological properties of the Cr2O3 films were also researched in detail. |
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