| YAN Xiao-qiang,WANG Han,ZHANG Jia-rong,YAO Hong-hui,ZHU Xiang-you,DENG Jian-nan,ZHUO Shao-mu,HE Jing-fan.#$NPCombined Process of Small Ball-end Contact Polishing and Magnetorheological Polishing for Small Aperture Aspheric surface[J],51(7):274-287, 323 |
| #$NPCombined Process of Small Ball-end Contact Polishing and Magnetorheological Polishing for Small Aperture Aspheric surface |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.07.027 |
| KeyWord:small aperture aspheric surface magnetorheological polishing small ball-end combined processing surface roughness form accuracy |
| Author | Institution |
| YAN Xiao-qiang |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| WANG Han |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| ZHANG Jia-rong |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| YAO Hong-hui |
Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| ZHU Xiang-you |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| DENG Jian-nan |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| ZHUO Shao-mu |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
| HE Jing-fan |
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Established by the Ministry and the Province Guangzhou , China;Key Laboratory of Micro-Nano Manufacturing Technology and Equipment of Guangdong Province, Guangdong University of Technology, Guangzhou , China |
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| Abstract: |
| The work aims to improve the surface quality and processing efficiency of aspheric optical molds. The current ultra-precision polishing methods and characteristics of aspheric surfaces are analyzed, proposed a combined process of small ball-end contact polishing and magnetorheological polishing for small aperture aspheric surface optical molds. The small ball is designed, and the tungsten carbide disc is polished. Compare the ball-end contact polishing and the above three kinds of different direction of the magnetic pole of permanent magnet ball-end of magnetorheological polishing processing performance. Three tungsten carbide aspheric molds with the same surface shape numbered 1#, 2#, and 3# were subjected to a single method polishing test and a combined processing test. The results of these tests are as follows:When analyzing the processing performance of the small ball-end polished tungsten carbide wafer, the removal rate of the contact polishing small ball-end is 926.5 nm/h, and the surface roughness(Ra) reaches 4.396 1 nm, the removal rates of magnetorheological polishing of permanent magnet small-end with axial, radial and horizontal magnetic poles are 391.7 nm/h, 344.3 nm/h, and 353.7 nm/h, and the surface roughness is 1.425 2 nm, 1.877 6 nm, and 1.887 5 nm. When verifying the effectiveness of the combined processing method of the polished aspheric surface, the surface roughness of aspherical surface 1# is decreased from Ra 8.786 6 nm to Ra 3.693 2 nm after single contact polishing for 60 min; the surface roughness of aspherical surface 2# is decreased from Ra 8.212 1 nm to Ra 1.674 5 nm after single magnetorheological polishing for 60 min; under the combined process, aspherical surface 3# was subjected to 15 min contact polishing and then 15 min magnetorheological polishing, the surface roughness was decreased from Ra 8.597 2 nm to Ra 1.269 4 nm, and the form accuracy was improved from PV 175.2 nm to PV 138.4 nm. The results show that the combined process can compensate for the defects of the single polishing method and effectively improve the form accuracy of the workpiece. Compared with the single contact polishing method, the surface quality obtained by the combined process is better, and the Ra after polishing is 1.269 4 nm, which is much smaller than the 3.693 2 nm under single contact polishing; Compared with the magnetorheological polishing method, the combined process is more highly efficient, it can reduce the time required to polish the sample to the same level of roughness from 60 min to 30 min. |
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