| XU Liang,WANG Lin,CHEN Hong-yu,HANG Wei,LYU Bing-hai,YUAN Ju-long.Research Progress in Ultra-precision Polishing of Tungsten and Its Alloys[J],51(4):24-36 |
| Research Progress in Ultra-precision Polishing of Tungsten and Its Alloys |
| Received:April 11, 2021 Revised:January 10, 2022 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.04.003 |
| KeyWord:tungsten alloy ultra-precision polishing surface quality low damage force-induced rheological polishing |
| Author | Institution |
| XU Liang |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
| WANG Lin |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
| CHEN Hong-yu |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
| HANG Wei |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
| LYU Bing-hai |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
| YUAN Ju-long |
Ultra-precision Machining Center, College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou , China |
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| Abstract: |
| Tungsten and its alloys are important basic materials in the high-tech industry at present. In recent years, the development of science and technology has put forward higher requirements on the surface quality of materials. Therefore, it is necessary to carry out ultra-precision polishing of tungsten and its alloys under specific conditions. Focusing on high efficiency, high quality and low damage polishing, combined with relevant studies at home and abroad, this paper reviewed ultra-precision polishing methods for tungsten and its alloys, such as Chemical mechanical polishing (CMP), Electrochemical polishing (ECP), Magneto-rheological finishing (MRF), Electrorheological polishing (ERP) and Force-induced rheological polishing (FRP). The processing principle, characteristics and material removal mechanism of these polishing methods were also described. Advantages and limitations of each polishing method were compared from the aspects of processing efficiency, processing precision, cost and environmental protection, etc. Considering the different application requirements of tungsten and its alloys, different polishing methods are applicable. CMP and ECP are most widely used in the industrial field, and both can realize high efficiency and high precision polishing of tungsten and its alloys. However, there are problems that the polishing slurry is highly corrosive and the waste slurry would pollute the environment. What’s more, the polishing slurry is also bound to affect the surface material of the workpiece. MRF, ERP and FRP belong to flexible polishing, which can control the polishing process by changing the external field conditions. The above three methods have higher processing accuracy, better processing quality and less processing damage layer. However, the preparation process of magnetic abrasives in MRF is complicated, and the polishing slurry is unstable. ERP has a low removal rate and high equipment requirements, which makes the processing cost relatively high. As an emerging polishing technology, FRP combines high efficiency and high quality, can achieve high surface accuracy and low roughness of materials, and has the advantages of simple operation, low processing cost, and environmental protection. From the perspective of processing workpieces, FRP is mainly divided into two types:shear thickening polishing (STP) in the form of polishing slurry and shear dilatancy polishing (SDP) in the form of polishing pad. STP is suitable for flat and complex surface polishing of workpieces, while SDP is mainly used for flat polishing. Seems both of them can both achieve ultra-precision polishing of complex curved surfaces, MRF and FRP are popular among researchers at this stage and are expected to become the most promising novel polishing methods. In this paper, a systematic understanding of various ultra-precision polishing methods and process improvements on this basis are of great significance to the development of new methods of ultra-precision processing of tungsten and its alloys. For tungsten and its alloys with large performance differences, the appropriate polishing method is different. It is necessary to select the appropriate polishing method according to the difference in material properties and processing requirements. Finally, the development trend of ultra-precision polishing of tungsten and its alloys is prospected from three aspects:enriching the theoretical system, optimizing the polishing process and paying attention to economy and environmental protection. |
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