| TAN Xin,XU Hong-fei,MENG Ke-ke.Experimental Preparation and Performance Research of Nano-Diamond TiV Color Center[J],51(3):192-198 |
| Experimental Preparation and Performance Research of Nano-Diamond TiV Color Center |
| Received:April 16, 2021 Revised:August 09, 2021 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.03.020 |
| KeyWord:magnetron sputtering chemical vapor deposition titanium doped diamond color center photoluminescence |
| Author | Institution |
| TAN Xin |
School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou , China |
| XU Hong-fei |
School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou , China |
| MENG Ke-ke |
School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou , China |
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| Abstract: |
| The work aims to prepare titanium-doped nano-diamond films by magnetron sputtering assisted microwave plasma chemical vapor deposition technology. Nano titanium particles were deposited on the quartz glass substrate by magnetron sputtering. Then, microwave plasma chemical vapor deposition (MPCVD) device was used to deposit a diamond film on the surface and the titanium was integrated into the carbon-containing growth group through active hydrogen atoms. Thus, titanium was incorporated into the nano-diamond film. X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), atomic force microscope (AFM) and confocal Raman microscopy were used to analyze the chemical composition, surface morphology and titanium color center photoluminescence properties of the titanium-doped nano-diamond films. The aforementioned experimental method doped titanium into the diamond film, thereby affecting the microstructure and surface morphology of the diamond film. XPS was used to conduct a detailed comparative analysis of the bond energy of titanium before and after MPCVD deposition in the experiment. The XPS energy spectrum of pre-sputtered titanium had obvious peaks at 458 eV and 464 eV, which was consistent with the energy spectrum of titanium oxide, while the peak of the titanium element shifted to 454 eV and 460 eV after the diamond film deposited by MPCVD, indicating that the titanium bonding changed. According to the Raman test, the incorporation of titanium caused the intensity of the G peak to increase. AFM showed that after the nano-diamond film doped with titanium, the surface roughness decreased from 13.8 nm to 6.69 nm. The photoluminescence phenomenon of titanium-doped nano-diamond film near 540 nm and 760 nm was observed for the first time by fluorescence detection. Doping titanium can refine the diamond grains, increase the graphite phase, and reduce the surface roughness. The photoluminescence spectrum indicates the existence of the TiV0 color center in the titanium-doped diamond film. The work provides a research foundation for the preparation of diamond transition metal color centers. |
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