| WANG Rui,TANG Si-wen,LIU De-shun,LIU Qian,BIAN Kai,LI Pei-zhen.Research on Performance of Nano-coated Tools Prepared by ALD at Low Temperature[J],50(5):364-371 |
| Research on Performance of Nano-coated Tools Prepared by ALD at Low Temperature |
| Received:May 25, 2020 Revised:July 04, 2020 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2021.05.041 |
| KeyWord:tool nano-coating atomic layer deposition (ALD) low temperature preparation microstructure binding force mechanical properties |
| Author | Institution |
| WANG Rui |
Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment,Xiangtan , China |
| TANG Si-wen |
Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment,Xiangtan , China |
| LIU De-shun |
Engineering Research Center of Mineral Resources Development Technology and Equipment for Deep Sea and Deep Earth, Ministry of Education, Hunan University of Science and Technology, Xiangtan , China |
| LIU Qian |
Engineering Research Center of Mineral Resources Development Technology and Equipment for Deep Sea and Deep Earth, Ministry of Education, Hunan University of Science and Technology, Xiangtan , China |
| BIAN Kai |
Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment,Xiangtan , China |
| LI Pei-zhen |
Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment,Xiangtan , China |
|
| Hits: |
| Download times: |
| Abstract: |
| The work aims to explore the low-temperature preparation technology of nano-coating based on Atomic Layer Deposition (ALD), and focus on the coating deposition process and the influence of nano-alumina coating on the mechanical properties of nano-alumina coated tools. Nano-Al2O3 coatings with different thicknesses were prepared by Atomic Layer Deposition at 200 ℃. The microstructure, thickness precision, hardness, fracture toughness, bending strength, bonding force, and friction coefficient of the coating were tested. The ALD deposition technology can uniformly deposit nano-coating on the surface of the YT5 cutter, and the coating is smooth and free of dripping bubbles, and the thickness of the coating can be accurately controlled at nano-thickness. The binding force between ALD coating and substrate is related to the coating thickness. With the increase of coating thickness, the binding force increases first and then decreases. The binding force of 50, 100, and 200 nm nano-coatings is measured to be 11.07, 12.74, and 7.86 N respectively. Nano-coating can improve the hardness of the tool and significantly reduce the friction coefficient of the tool surface. The measured friction coefficients of the tool are 0.56, 0.43, and 0.67 respectively, and the maximum reduction of the friction coefficient is over 40%. In addition, the deposition temperature of 200 ℃ does not produce metal phase transformation, thus it has no influence on the tool matrix, and the fracture toughness and bending strength of the tool does not reduce. The nano-coating tool prepared by ALD-based nano-coating low-temperature deposition technology has good mechanical properties and coating-substrate interface bonding force, which can significantly improve micro-cutting processing conditions and have broad application prospects in the micro-cutting field. |
| Close |
|
|
|