| PEI Lu-lu,JI Li,LI Hong-xuan,LIU Xiao-hong,ZHOU Hui-di,CHEN Jian-min.Effect of Fullerene-like Structure on Tribological Properties of Hydrogenated Carbon Films[J],49(6):68-75 |
| Effect of Fullerene-like Structure on Tribological Properties of Hydrogenated Carbon Films |
| Received:May 04, 2020 Revised:June 20, 2020 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2020.06.008 |
| KeyWord:fullerene-like structure hydrogenated carbon films reactive magnetron sputtering tribological properties spherical-like nanostructured particles |
| Author | Institution |
| PEI Lu-lu |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China; 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing , China |
| JI Li |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| LI Hong-xuan |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| LIU Xiao-hong |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| ZHOU Hui-di |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| CHEN Jian-min |
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
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| Abstract: |
| The work aims to study the tribological properties and lubrication mechanism of fullerene-like structured carbon films. Fullerene-like structured carbon films (FL-C:H) and amorphous hydrogenated carbon films (a-C:H) were prepared by regulating current with closed field unbalanced reactive magnetron sputtering technique. Scanning electron microscope (SEM) and atomic force microscope (AFM) were used to observe the morphology of the surface and cross section of the film. The structure of C─H bond was analyzed by Fourier transformation infrared spectra (FT-IR). The mechanical and tribological properties of the film were evaluated by nano-indentation, scratch tester and friction and wear test. The structure of wear debris was analyzed by high resolution transmission electron microscope (HRTEM), and the morphologies of wear scar were analyzed by optical microscope and 3D non-contact surface profilometer. The fullerene-like structure did not have obvious effect on the mechanical properties of the carbon films, but it had a significant effect on tribological properties of the carbon films under the higher load. Under lower load (5 N), the friction coefficient of FL-C:H film was higher than that of a-C:H film. While under higher load (20 N), FL-C:H film had a relatively lower friction coefficient (0.03) and wear rate (4.8×10-8 mm3/(m•N)) and spherical-like nanostructured particles were formed at the friction interface. The friction coefficient and wear rate of FL-C:H film decreased with the increase of load, and then tended to be stable. The spherical-like nanostructured particles were formed at the friction interface when the load was higher than 15 N. The formation of the spherical-like nanostructured particles reduces the friction coefficient and wear rate of the carbon films, while the FL-C:H film is easier to form the special structure at the friction interface than the a-C:H film. The formation of the spherical-like nanostructured particles also depends on the load, which is easier under higher load, so the fullerene-like carbon film is easier to maintain lower friction coefficient and wear rate under higher load. |
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