| WEI Xu-bing,ZHANG Ming-lan,WANG Yan,LU Zhi-bin,ZHANG Guang-an,LIN Bo.Deposition of Anti-corrosion and Wear-resisting DLC Coatings on Inner Wall of 304SS Tube[J],48(9):87-96 |
| Deposition of Anti-corrosion and Wear-resisting DLC Coatings on Inner Wall of 304SS Tube |
| Received:August 29, 2019 Revised:September 20, 2019 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.09.008 |
| KeyWord:HiPIMS power supply HC-PECVD pipe inner wall DLC corrosion resistance wear resistance uniformity |
| Author | Institution |
| WEI Xu-bing |
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China; 2.University of Chinese Academy of Sciences, Beijing , China |
| ZHANG Ming-lan |
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| WANG Yan |
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| LU Zhi-bin |
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China; 2.University of Chinese Academy of Sciences, Beijing , China |
| ZHANG Guang-an |
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China; 2.University of Chinese Academy of Sciences, Beijing , China |
| LIN Bo |
3.Guangxi Liugong Machinery Co., Ltd, Liuzhou , China |
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| Abstract: |
| The work aims to deposit DLC coatings on inner wall of 304SS tube by PECVD technology with HiPIMS power supply, so as to improve the mechanical properties and corrosion and wear resistance of the tube. HiPIMS power supply was applied to PECVD technology to generate high density plasma deposited DLC coatings inside 304SS tube by hollow cathode effect. The Raman spectra, SEM and EDS were used to characterize the structure and composition of DLC coatings. The hardness, adhesion force, corrosion resistance, tribology and wear resistance of DLC coatings were assessed by nano-indentation test, scratch test, potentiodynamic polarization test and friction and wear test, respectively. By applying HiPIMS power supply in PECVD technology, DLC coatings could be deposited on inner wall of 304SS tube. The thickness of DLC coatings increased from 5.60 μm to 10.26 μm, the hardness could reach 10~15 GPa, and the adhesion force (Lc2) between DLC coatings and inner wall of 304SS tube was more than 7 N. Furthermore, the corrosion current density of DLC coatings was smaller than that on bottom of bare 304SS tube about one order of magnitude and the corrosion potential shifted positively. DLC coatings had good lubrication effects with friction coefficients of (0.06~0.18) and wear rates of 2.5×10-7~8.1×10-7 mm3/(N•m) which were lower than the wear rate of bare 304SS tube (80×10-7 mm3/(N•m)). DLC coatings with higher hardness can be successfully deposited on the inner wall of 304SS tube by PECVD technology with HiPIMS power supply and the as-coated DLC coatings possess higher adhesion force with inner wall of 304SS tube and excellent corrosion and wear resistance as well as good lubrication. In addition, PECVD technology with HiPIMS power supply is expected to be used for the deposition of DLC coatings on the inner wall of longer pipe. |
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