| LI Yu-ge,YUAN Hai,JIANG Zhi-tao,LEI Ming-kai.Characteristic Process Parameters of NbN Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering[J],48(8):302-308 |
| Characteristic Process Parameters of NbN Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering |
| Received:March 25, 2019 Revised:August 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.08.040 |
| KeyWord:NbN coatings Modulated Pulsed Power Magnetron Sputtering phase structure hardness toughness |
| Author | Institution |
| LI Yu-ge |
Surface Engineering Laboratory, School of Materials Science and Technology, Dalian University of Technology, Dalian , China |
| YUAN Hai |
Surface Engineering Laboratory, School of Materials Science and Technology, Dalian University of Technology, Dalian , China |
| JIANG Zhi-tao |
Surface Engineering Laboratory, School of Materials Science and Technology, Dalian University of Technology, Dalian , China |
| LEI Ming-kai |
Surface Engineering Laboratory, School of Materials Science and Technology, Dalian University of Technology, Dalian , China |
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| Abstract: |
| The work aims to deposit a series of NbN coatings with different phase structures under varied micropulse duty cycle, charging voltage and bias voltage by Modulated Pulse Power Magnetron Sputtering (MPPMS) and then study the influence of micropulse duty cycle, charging voltage and bias voltage on the phase structure, microstructure and mechanical properties of NbN coatings without applying substrate temperature and the fixed ratio of Ar/N2 of 64/16. The phase composition, structure, hardness and toughness of NbN coatings were evaluated by X-ray diffraction, nano-indentation test and indentation test, respectively. The cross-sectional morphology and the indentation morphology were analyzed further by scanning electron microscope (SEM). When the micropulse duty cycle and charging voltage changed, all NbN coatings were composed of δ-NbN and δ'-NbN. When the bias voltage increased, NbN coating was mainly composed of δ'-NbN. All NbN coatings exhibited dense columnar crystal structure. As the micropulse duty cycle, the charging voltage and the negative bias voltage increased, the NbN coating became denser. With the increase of micropulse duty cycle, the coating hardness increased from 25 GPa to 36 GPa and the coating toughness also increased. When the charging voltage increased, the NbN coatings exhibited a regulation similar to that of the coatings prepared by controlling the micropulse duty cycle. After the negative bias voltage was applied, the coatings mainly consisted of δ'-NbN, and the hardness and toughness of the coatings were both reduced. The duplex phase structure and high density are the main factors that enhance the hardness and toughness of the NbN coatings. |
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