| HUANG Zhi-hong,YANG Dou,FU De-jun,YANG Bing.Effect of Carbon Content of CrC Interlayer on the Adhesion of CrC/a-C∶H Coatings[J],48(4):168-174 |
| Effect of Carbon Content of CrC Interlayer on the Adhesion of CrC/a-C∶H Coatings |
| Received:February 20, 2019 Revised:April 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.04.024 |
| KeyWord:CrC a-C∶H interlayer adhesion magnetron sputtering PECVD |
| Author | Institution |
| HUANG Zhi-hong |
1.Wenzhou Vocational and Technical College, Wenzhou , China |
| YANG Dou |
2.Wuhan University, Wuhan , China |
| FU De-jun |
2.Wuhan University, Wuhan , China |
| YANG Bing |
2.Wuhan University, Wuhan , China |
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| Abstract: |
| The work aims to improve the adhesion of hydrogenated amorphous carbon coating on substrate and study the effect of CrC interlayer with different carbon contents on the adhesion of CrC/a-C∶H coating. The CrC/a-C∶H coatings were prepared by reactive magnetron sputtering combined with RF PECVD. The C2H2 flow rate was adjusted (0, 10, 20, and 30 mL/min) to obtain CrC/a-C∶H coatings with different carbon contents in the CrC interlayer. The adhesion of the coating was measured by indentation and scratching. The coatings were characterized by Raman, AFM, SEM and Nano-indentation methods. With the increasing of the C content in the CrC interlayer, the adhesion of the coating first increased and then decreased. When the C2H2 flow rate was 20 mL/min, the CrC/a-C∶H coating had the highest adhesion force; the scratch adhesion force was 70.5 N and the indentation adhesion force was HF1. At this point, the hardness of the coating was 23.4 GPa and the RMS surface roughness was 36.9 nm. The ID/IG obtained by Gaussian curve fitting Raman map was 0.54 and the G peak position was 1535.9 cm-1. The SEM image showed that the coatings had two clear observable interfaces, the substrate/CrC interlayer interface and the CrC in-terlayer/a-C∶H top layer interface. The CrC interlayer of the CrC/a-C∶H coating was a columnar crystal structure and the top layer a-C∶H was amorphous. The carbon content of CrC interlayer has a significant effect on the adhesion of CrC/a-C∶H coating. The appropriate carbon content of CrC interlayer helps to improve the adhesion of the coating. When the carbon content is too high, the interlayer will change from crystalline to amorphous, which is not conducive to carrying the internal stress of the film from a-C∶H top layer, resulting in a sharp decline in the adhesion of CrC/a-C∶H coating. The adhesion failure of CrC/a-C∶H coating mainly occurs at the interface of CrC interlayer/a-C∶H top layer. The carbon content of the CrC interlayer affects the roughness of the CrC/a-C∶H coating. The adhesion of the coating is linearly related to the roughness. With different CrC interlayers for the same a-C∶H layer, smoother CrC/a-C∶H coatings have higher adhesion force. |
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