| WANG Ze-song,LIANG Feng,XIANG Yan-xiong,LI Song-quan,TIAN Can-xin,ZOU Chang-wei.Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed[J],48(4):160-167 |
| Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed |
| Received:January 07, 2019 Revised:April 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.04.023 |
| KeyWord:multi-arc ion plating nanomultilayer Mo-Ti-Al-N superlattice coatings microstructure modulation period backscattering spectroscopy |
| Author | Institution |
| WANG Ze-song |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
| LIANG Feng |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
| XIANG Yan-xiong |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
| LI Song-quan |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
| TIAN Can-xin |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
| ZOU Chang-wei |
School of Physics and Technology, Lingnan Normal University, Zhanjiang , China |
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| Abstract: |
| The work aims to study the impact of low substrate rotation speed on microstructure and physical properties of nanostructured multilayer. MoTiAlN/MoN/Mo composite coatings were deposited on silicon substrates by cathodic multi-arc ion plating, and the phase structure, morphology, component and nanohardness of coatings species were characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, Rutherford backscattering spectroscopy and nano-hardness tester. XRD results indicated that the coatings deposited at various substrate rotation speeds comprised hcp-MoN and fcc-(Ti,Al)N phases and the crystallinity was better at higher substrate rotation speed. SEM and TEM images confirmed that the mean modulation period and total physical thickness of superlattice TiAlN/MoN coatings with a sharp interface deposited at 2 r/min were 26 nm and 1.15 μm, respectively and the interface was clear. The nanohardness and Young modulus were up to (30±2) GPa and (500±30) GPa, respectively. RBS along with SIMNRA program proves to be a good method to evaluate the atomic concentrations, physical thicknesses of individual sublayers as well as the modulation periods of superlattice coatings quantitatively and provide reliable characterization for nanomultilayers. |
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