| SUN Kang,CUI Hong-zhi,TIAN Shuo-shuo,SONG Xiao-jie,WANG Wei-guo.Effects of Zr Content on Microstructure and Corrosion Resistance of NiCrZr Thin Film Prepared by Magnetron Sputtering[J],48(2):186-192 |
| Effects of Zr Content on Microstructure and Corrosion Resistance of NiCrZr Thin Film Prepared by Magnetron Sputtering |
| Received:October 09, 2018 Revised:February 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.02.027 |
| KeyWord:magnetron sputtering NiCrZr film microstructure electrochemical corrosion resistance |
| Author | Institution |
| SUN Kang |
Shandong University of Science and Technology, Qingdao , China |
| CUI Hong-zhi |
Shandong University of Science and Technology, Qingdao , China |
| TIAN Shuo-shuo |
Shandong University of Science and Technology, Qingdao , China |
| SONG Xiao-jie |
Shandong University of Science and Technology, Qingdao , China |
| WANG Wei-guo |
Shandong University of Science and Technology, Qingdao , China |
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| Abstract: |
| The work aims to form NiCrZr film on the 316L stainless steel by magnetron sputtering to improve the corrosion resistance in 3.5%NaCl solution. NiCrZr films with different Zr contents were prepared on 316L stainless steel substrates with NiCr (80at% : 20at%) composite target and pure Zr target by unbalanced magnetron sputtering. The phase composition, surface morphology, roughness, cross-sectional morphology, composition of the elements, thickness and the corrosion resistance in 3.5%NaCl solution were analyzed by XRD, AFM, SEM and Gamry electrochemical workstation, respectively. With the increase of Zr target power, the content of Zr in the film increased, the microstructure of the film was refined, and the surface roughness was reduced from 4.91 to 2.19 nm. The films were mainly composed of Cr3Ni2, Cr1.2Ni0.8Zr, Cr2Zr, CrO3, NiCrO4 and ZrO2, so the film was easily oxidized in air. Furthermore, with the increase of Zr content, the corrosion current of NiCrZr film in 3.5%NaCl solution decreased and the corrosion potential increased compared with the 316L substrate. When the Zr content was 24.73% (at%), the NiCrZr thin films exhibited the best corrosion resistance due to the formation of stable passivation layer in 3.5%NaCl solution, and the corrosion current density reached a minimum value of 13.10 nA/cm2, which was reduced by 19 times compared with 248.5 nA/cm2 of 316L. Thus, the increase of the Zr content can make the film denser, and can effectively improve the corrosion resistance of the coating by impeding the contact between the electrolyte and the substrate. |
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