| XU Jun-qi,SHI Yun-yun,LI Hou-jun,SU Jun-hong.Properties of MgF2/ZnS Composite Films Prepared by Dual-source Co-evaporation Technology[J],48(2):82-88 |
| Properties of MgF2/ZnS Composite Films Prepared by Dual-source Co-evaporation Technology |
| Received:August 15, 2018 Revised:February 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.02.012 |
| KeyWord:composite films refractive index extinction coefficient laser-induced damage threshold thermal evaporation dual-source co-evaporation |
| Author | Institution |
| XU Jun-qi |
Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an , China |
| SHI Yun-yun |
Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an , China |
| LI Hou-jun |
Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an , China |
| SU Jun-hong |
Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an , China |
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| Abstract: |
| The work aims to prepare MgF2/ZnS composite films by MgF2 and ZnS single-component materials and study the properties of the composite films in order to obtain films with arbitrary refractive index and to optimize the preparation method of films with high laser-induced damage threshold. Based on film thickness monitoring principle by optoelectronic extremum method, composite films were prepared by thermal evaporation of electron beam and resistance. The refractive index, extinction coefficient and transmittance spectrum of the composite films were investigated, and the laser damage characteristics were studied. Within the range of experiment parameters, when the deposition rate ratio of MgF2/ZnS was 5∶1, 4∶1, 2∶1, 1∶1 and 0.5∶1, the refractive index of the composite films was 1.4227, 1.4932, 1.6318, 1.9044 and 1.9044 (at the wavelength of 550 nm) respectively. The refractive index of the composite film accorded with the normal dispersion. When the deposition rate was selected reasonably, the material with arbitrary refractive index between two composite components could be obtained. The results of laser damage test showed that the laser damage threshold of the composite films prepared at different deposition rates might be between that of two kinds of single component films, or higher than that of any single component film. The maximum laser-induced damage threshold was 28.6% higher than that of MgF2 single-component films, and 96.4% higher than that of ZnS single-component. It is available to obtain the materials with arbitrary refractive index between the refractive index of one-component film materials based on the evaporation characteristics of different evaporation sources with the film thickness monitoring by optoelectronic extreme value method. It is feasible to obtain intermediate refractive index by dual-source co-evaporation technique. The shortage of single component film can be improved through the composite film prepared by dual-source co-evaporation technique so that the film with higher laser-induced damage threshold than that of single component film can be obtained. |
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