| ZHANG Er-geng,CHEN Qiang.Properties of DLC Composite Films Prepared by PECVD and Application of Mold[J],48(1):298-304 |
| Properties of DLC Composite Films Prepared by PECVD and Application of Mold |
| Received:August 12, 2018 Revised:January 20, 2019 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2019.01.039 |
| KeyWord:CrN/DLC adhesion strength wear resistance hardness life |
| Author | Institution |
| ZHANG Er-geng |
a.Institute of Surface Engineering, Shanghai Institute of Technology, Shanghai , China |
| CHEN Qiang |
b.School of Engineering Innovation, Shanghai Institute of Technology, Shanghai , China |
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| Abstract: |
| The work aims to compare and analyze the effects of CrN transition layer and different film thickness on the properties of DLC films and the molding characteristics of the coating mold. The CrN/DLC composite films were deposited on the surface of 718 alloy sample and mold by PECVD method. The thickness of the CrN transition layer and DLC film was preset as 0.2 μm and 0.5~1.2 μm respectively. The thickness of films for different deposition time (10 min, 15 min, 20 min, 25 min, 30 min and 35 min) was characterized by non-destructive equipment, and the surface and cross-sectional structure of the films were observed by scanning electron microscopy (SEM). Raman spectroscopy was used to analyze the peak position information and sp3-C/sp2-C ratio of DLC films with different thickness. The nano-indentator was used to characterize the film hardness, the hardness tester was adopted to analyze the adhesion strength of film and substrate and the profilometer was applied to characterize surface features. Moreover, all the mechanisms leading to the above effects were discussed. The thickness of all the films was within the preset range. The film structure fabricated by this method was compact, smooth, and free from defects such as delamination, pits, droplet adhesion, etc. The ratio of sp3-C/sp2-C in the film decreased and then increased with the increase of coating thickness, and the G peak approached D peak first and then went away. The hardness of film also increased with the in-crease of film thickness, and then decreased. 1.6 μm thick film had the highest hardness (HV3600). The highest adhesion strength of the film could reach HF2 of the industrial grade. The surface profile was free from greater range of fluctuations, and the minimum surface roughness Ra could reach 0.011 μm. The service life of the coating mold was increased by at least 1.5 times. For rubber mold, suitable thickness of DLC micro-nano coating can reduce wear and corrosion, lower the surface wettability of the mold body, and ensure the forming quality of rubber parts. |
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