| ZHOU Yong,KONG Cui-cui,LI Xiao-wei,SUN Li-li,GUO Peng,ZHOU Jia,LI Yu-hong,LI Wen-xian,WANG Ai-ying,KE Pei-ling.Effect of Ti/Al Transition Layer on Properties of Co-doped Diamond-like Carbon Films[J],48(1):268-275 |
| Effect of Ti/Al Transition Layer on Properties of Co-doped Diamond-like Carbon Films |
| Received:July 03, 2018 Revised:January 20, 2019 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.01.035 |
| KeyWord:diamond-like carbon film Ti-Al co-doped transition layer residual stress mechanical property |
| Author | Institution |
| ZHOU Yong |
1.School of Materials Science and Engineering, Shanghai University, Shanghai , China; 2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| KONG Cui-cui |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| LI Xiao-wei |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| SUN Li-li |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| GUO Peng |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| ZHOU Jia |
1.School of Materials Science and Engineering, Shanghai University, Shanghai , China; 2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| LI Yu-hong |
3.Gansu Key Laboratory of Solar Power Generation System Project, Jiuquan Vocational and Technical College, Jiuquan , China; 4.Jiuquan Institute of New Energy, Jiuquan , China |
| LI Wen-xian |
1.School of Materials Science and Engineering, Shanghai University, Shanghai , China |
| WANG Ai-ying |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
| KE Pei-ling |
2.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technologies and Engineering, Chinese Academy of Sciences, Ningbo , China |
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| Abstract: |
| The work aims to investigate the effect of the Ti/Al transition layer on composition, bonding structure, mechanical properties, and adhesive strength of Ti/Al co-doped DLC films (Ti/Al-DLC). Ti/Al-DLC film with Ti/Al transition layer was deposited on 316L substrates by novel linear ion beam source composited with DC magnetron sputtering process. The interface morphologies and steady structuresof the films were analyzed by field emission scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), high resolution transmission electron microscopy (HRTEM), and confocal laser Raman spec-troscopy. In-depth composition analysis of the sample was performed by glow discharge spectrometer, and the nano-indentation, scratch tester system, and residual stress meter were used to evaluate the hardness and elastic modulus, adhesive strength, and internal stress, respectively. Compared to the film without transition layer, the film with Ti/Al transition layer was slightly affected in the structure and mechanical properties and the optimal mechanical properties were achieved at the sputtering current of 2.5 A. When the sputtering current was 2.5 A, the addition of a Ti/Al transition layer increased the adhesive strength from 54.5 N to 67.2 N, which increased by 19% compared to the film without transition layer. Moreover, the residual stress decreased from 1.28 GPa to 0.25 GPa, which decreased by 80% significantly. The Ti/Al transition layer can further reduce the difference in lattice strain between the DLC film and the substrate and the high interfacial stress caused by the different expansion coefficients. The typical columnar crystal structure for the transition layer formed between the film and the substrate can promote the mechanical interaction between the film-based interfaces and significantly improve the adhesion between the film and the substrate without damaging the mechanical properties. |
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