| ZHANG Shu-jiao,WU Yan-xia,ZHU Li-nan,TANG Bin,LIU Ying.Effects of Different Doping on Diamond-like Carbon Films[J],47(9):193-198 |
| Effects of Different Doping on Diamond-like Carbon Films |
| Received:March 20, 2018 Revised:September 20, 2018 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2018.09.025 |
| KeyWord:DLC films doping hardness tribological properties corrosion resistance magnetron sputtering |
| Author | Institution |
| ZHANG Shu-jiao |
Taiyuan University of Technology, Taiyuan , China |
| WU Yan-xia |
Taiyuan University of Technology, Taiyuan , China |
| ZHU Li-nan |
Taiyuan University of Technology, Taiyuan , China |
| TANG Bin |
Taiyuan University of Technology, Taiyuan , China |
| LIU Ying |
Taiyuan University of Technology, Taiyuan , China |
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| Abstract: |
| The work aims to study the effects of Si-doping and (Si,Ag)-codoping on structure, tribological properties and corrosion resistance of diamond like carbon (DLC) films. With high purity graphite target, graphite & metallic composite target and Si target as targets, the films containing different doped elements were prepared by radio frequency (RF) enhanced magnetron sputtering technology. Chemical composition and structure of the films were analyzed by XPS and Raman spectrometer. Mechanical property, tribological properties and corrosion resistance of the films were systematically characterized by nano-indentation tester, ball-on-disc tribometer and electrochemical workstation, respectively. Doping of Si into DLC films could cause sp3 C content to increase. Codoping of Si and Ag into DLC films could cause sp3 C content to decrease as Ag was distributed in the film in the form of metallic phase and formation of the sp2 phase was promoted. The film hardness decreased with the doping of elements while its toughness was improved, and elastic recovery rate of the films co-doped with Ag and Si was 79%. In addition, the DLC films co-doped with Si and Ag exhibited excellent tribological properties, wear life of the films exceeded 30 min in different atmosphere (Ar,O2,N2), friction coefficient of the films was the lowest (<0.1) in N2, corrosion current density of the films decreased by nearly 2 orders of magnitude, and the films had good corrosion resistance in NaCl solution. Compared with Si-doped DLC films, the films co-doped with Si and Ag exhibit better friction environment self-adaption and corrosion resistance. |
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