| WENG Jun,LIU Fan,SUN Qi,WANG Jian-hua.Investigation on the Grain Size Control of Diamond Films in CO2-CH4 Gas Mixture[J],47(1):211-217 |
| Investigation on the Grain Size Control of Diamond Films in CO2-CH4 Gas Mixture |
| Received:May 26, 2017 Revised:January 20, 2018 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2018.01.033 |
| KeyWord:microcrystalline diamond film nanocrsrystalline diamond film hydrogen-free deposition controllable growth microwave plasma |
| Author | Institution |
| WENG Jun |
Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan , China |
| LIU Fan |
Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan , China |
| SUN Qi |
Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan , China |
| WANG Jian-hua |
Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan , China |
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| Abstract: |
| The work aims to study law of influence of CO2/CH4 flow ratio on growth of diamond films and grain size. The diamond films exhibiting different structural features were prepared controllably by adjusting the CO2/CH4 flow ratio and applying MPCVD technology. The diamond films were characterized and analyzed with scanning electron microscope, X-ray diffractometer and Raman spectrum, the rule of influence of CO2/CH4 flow ratio on grain size of diamond films was obtained. When microwave power, deposition pressure, substrate temperature and of CH4 flow was 1.2 kW, 7.0 kPa, 850 ℃ and 50 mL/min, respectively, nanocrystalline diamond films could be deposited using 20 and 25 mL/min CO2, microcrystalline diamond films could be obtained using 30 and 35 mL/min CO2, and diamond could be deposited using 67 mL/min CO2. By adjusting microwave power to 0.9, 1.4, 1.8 kW, respectively while keeping the other parameters constant, grain size variation of diamond films along with the CO2/CH4 flow ratio could be divide into three regions: nanocrystalline diamond film deposition region (CO2/CH4<50%), microcrystalline diamond film deposition region (CO2/CH4>60%), and grain size transition region (50% |
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