| WANG Zhi-feng,XU Bin,ZHANG Shu-jiao,ZHU Li-nan,ZHOU Bing.Properties of DLC Films Doped with Metal by Selective Bonding[J],46(6):110-116 |
| Properties of DLC Films Doped with Metal by Selective Bonding |
| Received:January 28, 2017 Revised:June 20, 2017 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2017.06.017 |
| KeyWord:metal doping diamond like carbon films hardness residual stress frictional properties multiphase structure |
| Author | Institution |
| WANG Zhi-feng |
Taiyuan University of Technology, Taiyuan , China |
| XU Bin |
Taiyuan University of Technology, Taiyuan , China |
| ZHANG Shu-jiao |
Taiyuan University of Technology, Taiyuan , China |
| ZHU Li-nan |
Taiyuan University of Technology, Taiyuan , China |
| ZHOU Bing |
Taiyuan University of Technology, Taiyuan , China |
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| Abstract: |
| The work aims to study effects of DLC films doped with metallic elements (Cu,Al,Ti) featuring in selective bonding on structure and tribological properties of such DLC films. With high purity graphite and metallic composite target as targets, metallic composite DLC films were fabricated on n-(100) single crystal silicon wafers and polished stainless steel sheets 304 by applying ion-source plating technology. The Raman Spectrometer excited by 514.6 nm Ar+ was used to analyze the metallic composite DLC films. Knoop hardness tester and surface profiler were used to calculate microhardness and residual stress of the metallic composite films. AFM was used to analyze morphology and structure of DLC films. Ball-disk sliding abrasion tester was used to analyze tribological property. The films doped with different metallic elements exhibited various properties. The wear rate changed a lot while frictional coefficient was stable after doping with different metallic elements. The original DLC films featured in maximum content of sp3 bonding, high hardness, residual stress and easy falling-out during friction process. The Ti-DLC composite films featured in good surface quality and compact structure. The films maintained at high hardness while releasing residual stress. The minimum measured wear rate of Ti-DLC composite films was 0.13×10-15 m3/nm. Doping different metallic elements in DLC films can control microstructure, improve mechanical properties (including hardness and residual stress) and abrasion resistance obviously. The tribological properties of the films are closely related to film microstructure and the existing form of metallic elements. |
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