| WU Yan,LI Yan-feng,ZHANG Er-geng,ZHAO Jie.PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance[J],45(8):115-123 |
| PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance |
| Received:March 09, 2016 Revised:August 20, 2016 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2016.08.020 |
| KeyWord:diamond-like carbon friction coefficient adhesion physical vapor deposition |
| Author | Institution |
| WU Yan |
Shanghai Institute of Technology, Shanghai , China |
| LI Yan-feng |
Shanghai Institute of Technology, Shanghai , China |
| ZHANG Er-geng |
Shanghai Institute of Technology, Shanghai , China |
| ZHAO Jie |
Shanghai Institute of Technology, Shanghai , China |
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| Abstract: |
| This work introduced the method to prepare DLC coating by physical vapor deposition (PVD) and then demonstrated the current research situation and development prospect of frictional wear and adhesion performance. It analyzed and summarized the technical development of DLC coating technology as well as DLC film preparation methods and factors influencing its functions. Workpiece with DLC films had relatively high hardness, good thermal conductivity, low coefficient of friction, excellent electrical insulation properties and so on. Diamond-like carbon (DLC) film is a metastable material combining the form of sp3 and sp2 bonds that has sprung up in recent years. DLC films have been widely applied in tribological field because of excellent friction-reduction and anti-wear properties. It is a new coating with properties similar to the diamond thin film. The study of DLC coating mainly focuses on its tribological property and binding force. As high-quality coating material, the DLC film has been widely applied in various fields such as automobile, mould, tools etc. |
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