| WANG Hao-qi,QIN Li-zhao,GUAN Jia-jian,LI Bin,LIN Hua,LI Yuan,LIANG Hong,LIAO Bin.Structure and Composition Investigation of CrCN Films Prepared by Fil-tered Cathodic Vacuum Arc Technique[J],46(1):9-14 |
| Structure and Composition Investigation of CrCN Films Prepared by Fil-tered Cathodic Vacuum Arc Technique |
| Received:August 05, 2016 Revised:January 20, 2017 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2017.01.002 |
| KeyWord:CrCN structural analysis magnetic filtered cathodic arc deposition FCVAD XPS |
| Author | Institution |
| WANG Hao-qi |
Department of Materials and Energy, Southwest University, Chongqing , China |
| QIN Li-zhao |
Department of Materials and Energy, Southwest University, Chongqing , China |
| GUAN Jia-jian |
Department of Materials and Energy, Southwest University, Chongqing , China |
| LI Bin |
Department of Materials and Energy, Southwest University, Chongqing , China |
| LIN Hua |
Department of Materials and Energy, Southwest University, Chongqing , China |
| LI Yuan |
Department of Materials and Energy, Southwest University, Chongqing , China |
| LIANG Hong |
Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing , China |
| LIAO Bin |
Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing , China |
|
| Hits: |
| Download times: |
| Abstract: |
| The work aims to prepare favorable CrCN coatings by magnetic filtered cathodic arc deposition and study the effects of acetylene/nitrogen gas flow rate and substrate bias on structure and composition of the films. CrCN composite films were deposited by filtered cathodic vacuum arc deposition technique at different C2H2/N2 mixed gas flow rates ranging from 20 mL/min to 100 mL/min. Phase structure and morphology of the films were analyzed by X-ray diffraction, field emission scanning electronic microscope, transmission electron microscope, scanning probe microscope, X-ray photoelectron spectroscopy and transmission electron microscope. The amorphous degree of the films increased gradually as the gas flow rate increased; TEM showed that a large number of nanocrystallines immersed in amorphous composition of the CrCN composite films; SPM showed that the surface roughness of CrCN thin films increased from 0.345 nm to 4.38 nm as the substrate bias from increased –200 V to –150 V; XPS, TEM and XRD data showed that the Cr element in the films mainly existed as pure Cr, CrN and Cr3C2. The CrCN composite films prepared by virtue of the magnetic filtered vacuum cathodic arc deposition technology have amorphous-nanocrystalline mosaic structure. The surface roughness of CrCN films is related to the negative bias of the substrate. The increase of gas flow rate of mixed gas has little effect on the change of film composition. |
| Close |
|
|
|