| ZENG Hua-zhi,WANG Hai,SHEN Jun.Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings[J],45(2):79-83 |
| Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings |
| Received:January 05, 2016 Revised:February 20, 2016 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2016.02.012 |
| KeyWord:arc ion plating TiN gradient coating nanoindentation nano-scratch mechanical property |
| Author | Institution |
| ZENG Hua-zhi |
College of Materials Science and Engineering, Tongji University, Shanghai , China |
| WANG Hai |
College of Materials Science and Engineering, Tongji University, Shanghai , China |
| SHEN Jun |
College of Materials Science and Engineering, Tongji University, Shanghai , China |
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| Abstract: |
| Objective To obtain TiN coatings with excellent comprehensive performance through gradient bias voltage deposition. Methods Gradient TiN coatings were deposited by arc ion plating with gradient bias voltage through 0 V to -180 V. Coating phase structure and morphology were analyzed through X-ray diffraction and scanning electron microscope. The mechanical properties were investigated through nanoindentation and nano-scratch test. Results Compared with the constant bias voltage coatings, the intensity of the (111) peak decreased in the gradient bias voltage coatings. The thickness of the coatings decreased, which indicated that the deposition rate was increased. The testing results showed as below. The gradient bias voltage coatings had the Lc2 of 215. 21 mN, the hardness of 31. 2 GPa, the elastic modulus of 498 GPa and the Ly of 81. 65 mN. The constant bias voltage coatings had the Lc2 of 248. 63 mN, the hardness of 29. 6 GPa, the elastic modulus of 452 GPa and the Ly of 23. 39 mN. Even though the Lc2 of the gradient bias voltage coatings decreased, the hardness, the elastic modulus and the plasticity increased, and the (Ly) increased greatly. A TiN coating with excellent comprehensive performance was achieved. Conclusion The gradient bias voltage deposition method was used to change the single parameter setting. The gradient bias voltage changed the influence of the coating growth continually during deposition, which made the obtained coatings have a gradient change in the structure. Thus, the mechanical properties were improved. |
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