| SONG Yi-ze,GAO Yuan,DONG Zhong-xin,ZHANG Yan,PENG Kai,WANG CHENG-lei.Influence of Negative Bias on TiN Film Deposited by Multi-arc Ion Plating[J],44(11):1-6,28 |
| Influence of Negative Bias on TiN Film Deposited by Multi-arc Ion Plating |
| Received:August 24, 2015 Revised:November 20, 2015 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2015.11.001 |
| KeyWord:MAIP TiN negative bias voltage wear resistance fording force hardness |
| Author | Institution |
| SONG Yi-ze |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
| GAO Yuan |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
| DONG Zhong-xin |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
| ZHANG Yan |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
| PENG Kai |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
| WANG CHENG-lei |
1. Guangxi Key Laboratory of Information Materials, Guilin , China;2. School of Materials Science and Technology, Guilin University of Electronic Technology, Guilin , China;3. Guilin Guanglu Measuring Instrument Co. , Ltd, Guilin , China |
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| Abstract: |
| Objective In order to improve the comprehensive performance of TiN coatings, the appropriate negative bias was in- vestigated. Methods TiN coatings were deposited with different negative bias voltage on the surface of 4Cr13 stainless steel, and the effect of negative bias voltage on the surface quality, microstructure, hardness, binding force and friction coefficient of the coa- tings was investigated. Results The results showed that negative bias voltage had an obvious influence on the surface quality of the TiN coating. When the negative bias voltage was 0 V, there were many droplets, larger particles and a few pits. With the increase of the bias voltage, the number and size of droplets on the film surface were reduced, and the coatings surface became smooth and more compact. TiN films deposited at different bias voltage all showed preferred orientation in (111) crystal plane, but with the increase of bias voltage, the preferred orientation gradually diminished, when the bias voltage was 400 V, the peak value of the film on the (220) crystal plane was gradually strengthened. When the bias voltage changed between 0 V and 400 V, the hardness, fording force and abrasion resistance of coatings first increased and then decreased. When the bias voltage was 300 V, the biggest hardness and fording force reached 2650HV and 58 N, respectively; The friction coefficient and abrasion loss were 0. 48 and 0. 1065 mm3, respec- tively. Conclusion Applying proper negative bias voltage could improve the comprehensive properties of coatings, such as hardness, fording force and abrasion resistance. When the bias voltage was 300 V, the TiN film deposited showed the best properties. |
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