| .Application Research on Negative bias"s Influence on binding TiN Film Deposited by Multi-arc Ion Plating[J],44(11):1-6,28 |
| Application Research on Negative bias"s Influence on binding TiN Film Deposited by Multi-arc Ion Plating |
| Received:September 20, 2015 Revised:October 30, 2015 |
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| DOI： |
| KeyWord:MAIP TiN negative bias voltage wear resistance fording force hardness |
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| Abstract: |
| TiN coatings were deposited with different negative bias voltage on 4Cr13 stainless steel. The effect of negative bias voltage on the surface microstructure, hardness, phase structure, binding force of the coatings was investigated. Results showed that negative bias voltage can obviously improve the surface quality of the TiN. There are many droplet, larger particles and a few pits with no negative bias voltage. With the rising of the bias voltage, the number and size of droplet on the film surface were reduced, and the coatings surface becomes smooth and density is also improved; TiN film at different bias voltage all reflects in preferred orientation in (111) crystal plane, but with the increase of bias voltage, the preferred orientation gradually diminishes with bias voltage, when the bias voltage is 400 V, the film in the peak of (220) crystal plane gradually strengthened; When the bias changes between 0V and 400V, hardness of coatings first increases then decrease, when the bias is 300V, the biggest hardness achieve to 2650 HV; More than 300 V, the hardness began to decrease; the fording force increases with the increase of bias voltage, but to a certain extent, began to reduce. When the bias voltage is 200 V, the fording force is about 42 N, the bias is 300 V, the bonding force is the largest 58 N, but the bias is 400 V, the fording force film fall to 42 N; When the bias is respectively: 0 V, 200 V, 300 V, 400 V: the average friction coefficient is respectively: 0.66, 0.55, 0.48 and 0.5; Proper bias voltage can improve the hardness, fording force, abrasion resistance of coatings; when the bias voltage is 300 V, the various properties of the film is the best. |
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