| WEI Yong-qiang,WEI Yong-hui,JIANG Zhi-qiang,TIAN Xiu-bo.Influence of Placement Orientation and Deposition Time on the Morphology and Distribution of Ti Macroparticles[J],43(5):6-10,41 |
| Influence of Placement Orientation and Deposition Time on the Morphology and Distribution of Ti Macroparticles |
| Received:April 17, 2014 Revised:August 04, 2014 |
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| DOI： |
| KeyWord:arc ion plating TiN macroparticles placement orientation deposition time |
| Author | Institution |
| WEI Yong-qiang |
School of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan, Zhengzhou ,China;State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin , China |
| WEI Yong-hui |
School of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan, Zhengzhou ,China |
| JIANG Zhi-qiang |
School of Mechatronics Engineering, Zhengzhou Institute of Aeronautical Industry Management, Zhengzhou , China;Engineering Technology Research Center of Aviation Manufacturing & Equipment, University of Henan, Zhengzhou ,China |
| TIAN Xiu-bo |
State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin , China |
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| Abstract: |
| Objective The effects of different placement orientation between substrate surface and target surface and the deposition time on the morphology and distribution of Ti macroparticles ( MPs) were studied. Methods TiN films were deposited on the substrate by the arc ion plating method, the surface morphology of the Ti films was observed by the Scanning electron microscopy ( SEM) method, and the amount and size of Ti MPs in the surface of TiN films were analyzed using the scientific image software ImageJ. Results When the distance between the target and the substrate was 25 cm, the amount and area fraction of MPs in the films were lower when the substrate surface and the target surface were placed perpendicularly, as compared to those when the substrate surface and the target surface were placed in parallel. Meanwhile, a typical strip shape MPs appeared. With the deposition time increasing from 5 min to 50 min, the amount and the area fraction showed a trend of first decreasing followed by increasing. Conclusion When the placement orientation was perpendicular between the substrate surface and the target surface, and the deposition time was 30 ~ 40 min, the deposition thickness of the film and the reduction of MPs could be achieved at the same time. |
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